Aerosol-Assisted Chemical Vapor Deposition of ZnS from Thioureide Single Source Precursors

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pp. 2784-2797 ◽  
Author(s):  
Hannah S. I. Sullivan ◽  
James D. Parish ◽  
Prem Thongchai ◽  
Gabriele Kociok-Köhn ◽  
Michael S. Hill ◽  
...  
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Michael H.-C. Jin ◽  
Kulbinder K. Banger ◽  
Jerry D. Harris ◽  
Aloysius F. Hepp

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Stefan Möckel ◽  
Marcus Korb ◽  
Tobias Rüffer ◽  
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Single-source precursors Ru(CO)2(P(n-Bu)3)2(O2CR)2 allow the successful deposition of Ru(P) layers by the CVD process.


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Vol 17 (2) ◽  
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Mark A. Buckingham ◽  
Amanda L. Catherall ◽  
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Vol 47 (8) ◽  
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Readily available N,N-disubstituted-N′-acylthiourea complexes are single source precursors for aerosol assisted chemical vapor deposition of metal sulfide thin films.


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Karthik Ramasamy ◽  
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