Facile Phase Control of Multivalent Vanadium Oxide Thin Films (V2O5 and VO2) by Atomic Layer Deposition and Postdeposition Annealing

2017 ◽  
Vol 9 (28) ◽  
pp. 23909-23917 ◽  
Author(s):  
Gwang Yeom Song ◽  
Chadol Oh ◽  
Soumyadeep Sinha ◽  
Junwoo Son ◽  
Jaeyeong Heo
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Vanadium Oxide ◽  
Atomic Layer ◽  
Phase Control ◽  
Oxide Thin Films ◽  
Layer Deposition ◽  
Vanadium Oxide Thin Films

Atomic layer deposition and characterization of vanadium oxide thin films

RSC Advances ◽  
2013 ◽  
Vol 3 (4) ◽  
pp. 1179-1185 ◽  
Author(s):  
Timothee Blanquart ◽  
Jaakko Niinistö ◽  
Marco Gavagnin ◽  
Valentino Longo ◽  
Mikko Heikkilä ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Vanadium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition ◽  
Vanadium Oxide Thin Films

Phase control of iridium and iridium oxide thin films in atomic layer deposition

2008 ◽  
Vol 103 (2) ◽  
pp. 023517 ◽  
Author(s):  
Sung-Wook Kim ◽  
Se-Hun Kwon ◽  
Dong-Kee Kwak ◽  
Sang-Won Kang
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Phase Control ◽  
Iridium Oxide ◽  
Oxide Thin Films ◽  
Layer Deposition

scholarly journals Atomic layer deposition of crystalline molybdenum oxide thin films and phase control by post-deposition annealing

2018 ◽  
Vol 9 ◽  
pp. 17-27 ◽  
Author(s):  
Miika Mattinen ◽  
Peter J. King ◽  
Leonid Khriachtchev ◽  
Mikko J. Heikkilä ◽  
Ben Fleming ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Molybdenum Oxide ◽  
Atomic Layer ◽  
Phase Control ◽  
Oxide Thin Films ◽  
Post Deposition Annealing ◽  
Layer Deposition ◽  
Post Deposition

scholarly journals Fabrication of GdxFeyOz films using an atomic layer deposition-type approach

CrystEngComm ◽  
2021 ◽  
Author(s):  
Pengmei Yu ◽  
Sebastian M. J. Beer ◽  
Anjana Devi ◽  
Mariona Coll
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Complex Oxide ◽  
Oxide Thin Films ◽  
Layer Deposition ◽  
Atomic Precision

The growth of complex oxide thin films with atomic precision offers bright prospects to study improved properties and novel functionalities.

Cyclopentadienyl Precursors for the Atomic Layer Deposition of Erbium Oxide Thin Films

2014 ◽  
Vol 20 (7-8-9) ◽  
pp. 217-223 ◽  
Author(s):  
Timothee Blanquart ◽  
Mikko Kaipio ◽  
Jaakko Niinistö ◽  
Marco Gavagnin ◽  
Valentino Longo ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Erbium Oxide ◽  
Oxide Thin Films ◽  
Layer Deposition

scholarly journals Preparation of Hafnium Oxide Thin Films grown by Atomic Layer Deposition

2005 ◽  
Vol 15 (4) ◽  
pp. 275-280
Author(s):  
Hie-Chul Kim ◽  
Min-Wan Kim ◽  
Hyung-Su Kim ◽  
Hyug-Jong Kim ◽  
Woo-Keun Sohn ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Hafnium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition
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