scholarly journals Atomic layer deposition of vanadium oxide thin films from tetrakis(dimethylamino)vanadium precursor

2016 ◽  
Vol 32 (1) ◽  
pp. 37-44 ◽  
Author(s):  
Xinwei Wang ◽  
Zheng Guo ◽  
Yuanhong Gao ◽  
Jue Wang
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Vanadium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition ◽  
Vanadium Oxide Thin Films ◽  
Image Position

Abstract

Atomic layer deposition and characterization of vanadium oxide thin films

RSC Advances ◽  
2013 ◽  
Vol 3 (4) ◽  
pp. 1179-1185 ◽  
Author(s):  
Timothee Blanquart ◽  
Jaakko Niinistö ◽  
Marco Gavagnin ◽  
Valentino Longo ◽  
Mikko Heikkilä ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Vanadium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition ◽  
Vanadium Oxide Thin Films

scholarly journals Atomic layer deposition of zirconium oxide thin films

2019 ◽  
Vol 35 (7) ◽  
pp. 804-812
Author(s):  
Xin Wang ◽  
Sujan Kumar Ghosh ◽  
Mahyar Afshar-Mohajer ◽  
Hua Zhou ◽  
Yongqiang Liu ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Zirconium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition ◽  
Image Position

Abstract

scholarly journals Fabrication of GdxFeyOz films using an atomic layer deposition-type approach

CrystEngComm ◽  
2021 ◽  
Author(s):  
Pengmei Yu ◽  
Sebastian M. J. Beer ◽  
Anjana Devi ◽  
Mariona Coll
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Complex Oxide ◽  
Oxide Thin Films ◽  
Layer Deposition ◽  
Atomic Precision

The growth of complex oxide thin films with atomic precision offers bright prospects to study improved properties and novel functionalities.

Cyclopentadienyl Precursors for the Atomic Layer Deposition of Erbium Oxide Thin Films

2014 ◽  
Vol 20 (7-8-9) ◽  
pp. 217-223 ◽  
Author(s):  
Timothee Blanquart ◽  
Mikko Kaipio ◽  
Jaakko Niinistö ◽  
Marco Gavagnin ◽  
Valentino Longo ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Erbium Oxide ◽  
Oxide Thin Films ◽  
Layer Deposition

scholarly journals Preparation of Hafnium Oxide Thin Films grown by Atomic Layer Deposition

2005 ◽  
Vol 15 (4) ◽  
pp. 275-280
Author(s):  
Hie-Chul Kim ◽  
Min-Wan Kim ◽  
Hyung-Su Kim ◽  
Hyug-Jong Kim ◽  
Woo-Keun Sohn ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Hafnium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition
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