Nanometer-Thick SiN Films as Gas Barrier Coatings Densified by Vacuum UV Irradiation
1980 ◽
Vol 25
(7)
◽
pp. 1391-1405
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2007 ◽
Vol 202
(2)
◽
pp. 208-216
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1993 ◽
Vol 97
(40)
◽
pp. 10352-10357
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Keyword(s):
2011 ◽
Vol 186
(1)
◽
pp. 240-246
◽
1996 ◽
Vol 80
(1-2)
◽
pp. 203-206
◽
Keyword(s):
1998 ◽
Vol 100-101
◽
pp. 459-462
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Keyword(s):