Intrinsic Amorphous Silicon (a-Si:H) Thin Film Prepared by Using Remote Plasma Chemical Vapor Deposition Method and Used as a Passivation Layer for a Heterojunction Solar Cell

2009 ◽  
Vol 54 (1) ◽  
pp. 194-199 ◽  
Author(s):  
Minsung Jeon ◽  
Shuhei Yoshiba ◽  
Koichi Kamisako
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