Chemical Vapor Deposition and Etching of High-Quality Monolayer Hexagonal Boron Nitride Films

ACS Nano ◽

10.1021/nn202141k ◽

2011 ◽

Vol 5 (9) ◽

pp. 7303-7309 ◽

Author(s):

Peter Sutter ◽

Jayeeta Lahiri ◽

Peter Albrecht ◽

Eli Sutter

Keyword(s):

Chemical Vapor Deposition ◽

Boron Nitride ◽

Vapor Deposition ◽

Hexagonal Boron Nitride ◽

Chemical Vapor ◽

High Quality ◽

Boron Nitride Films

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Free Exciton Emission from Hexagonal Boron Nitride Films Grown on Sapphire Substrates by Low Pressure Chemical Vapor Deposition

10.7567/ssdm.2015.ps-8-6 ◽

2015 ◽

Author(s):

N. Umehara ◽

A. Masuda ◽

T. Shimizu ◽

T. Kouno ◽

H. Kominami ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Boron Nitride ◽

Vapor Deposition ◽

Hexagonal Boron Nitride ◽

Free Exciton ◽

Chemical Vapor ◽

Exciton Emission ◽

Sapphire Substrates ◽

Pressure Chemical ◽

Boron Nitride Films

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Hardness and Young’s modulus of high-quality cubic boron nitride films grown by chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.1534625 ◽

2003 ◽

Vol 93 (3) ◽

pp. 1515-1519 ◽

Author(s):

X. Jiang ◽

J. Philip ◽

W. J. Zhang ◽

P. Hess ◽

S. Matsumoto

Keyword(s):

Chemical Vapor Deposition ◽

Boron Nitride ◽

Young’S Modulus ◽

Vapor Deposition ◽

Young's Modulus ◽

Cubic Boron Nitride ◽

Chemical Vapor ◽

High Quality ◽

Boron Nitride Films

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Ultrathin Chemical Vapor Deposition (CVD)-Grown Hexagonal Boron Nitride as a High-Quality Dielectric for Tunneling Devices on Rigid and Flexible Substrates

The Journal of Physical Chemistry C ◽

10.1021/jp410874z ◽

2014 ◽

Vol 118 (6) ◽

pp. 3340-3346 ◽

Author(s):

Carlo M. Orofeo ◽

Satoru Suzuki ◽

Hiroki Hibino

Keyword(s):

Chemical Vapor Deposition ◽

Boron Nitride ◽

Vapor Deposition ◽

Hexagonal Boron Nitride ◽

Chemical Vapor ◽

Flexible Substrates ◽

High Quality ◽

Tunneling Devices

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High-quality, faceted cubic boron nitride films grown by chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.1428762 ◽

2001 ◽

Vol 79 (27) ◽

pp. 4530-4532 ◽

Author(s):

W. J. Zhang ◽

X. Jiang ◽

S. Matsumoto

Keyword(s):

Chemical Vapor Deposition ◽

Boron Nitride ◽

Vapor Deposition ◽

Cubic Boron Nitride ◽

Chemical Vapor ◽

High Quality ◽

Boron Nitride Films

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Chemical Vapor Deposition of Hexagonal Boron Nitride Films on c-plane Sapphire Substrates

10.7567/ssdm.2014.h-2-2 ◽

2014 ◽

Author(s):

N. Umehara ◽

I. Kuwahara ◽

T. Kouno ◽

H. Kominami ◽

Y. Nakanishi ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Boron Nitride ◽

Vapor Deposition ◽

Hexagonal Boron Nitride ◽

Chemical Vapor ◽

Sapphire Substrates ◽

Boron Nitride Films

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Synthesis of thick and high quality cubic boron nitride films by r.f. bias assisted d.c. jet plasma chemical vapor deposition

Diamond and Related Materials ◽

10.1016/j.diamond.2004.02.010 ◽

2004 ◽

Vol 13 (9) ◽

pp. 1704-1708 ◽

Author(s):

J Yu ◽

S Matsumoto

Keyword(s):

Chemical Vapor Deposition ◽

Boron Nitride ◽

Vapor Deposition ◽

Cubic Boron Nitride ◽

Chemical Vapor ◽

Plasma Chemical ◽

High Quality ◽

Plasma Chemical Vapor Deposition ◽

Boron Nitride Films

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Residual compressive stress induced infrared-absorption frequency shift of hexagonal boron nitride in cubic boron nitride films prepared by plasma-enhanced chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.4749805 ◽

2012 ◽

Vol 112 (5) ◽

pp. 053502 ◽

Author(s):

Yong Liu ◽

Panpan Jin ◽

Aili Chen ◽

Hangsheng Yang ◽

Yabo Xu

Keyword(s):

Chemical Vapor Deposition ◽

Boron Nitride ◽

Frequency Shift ◽

Infrared Absorption ◽

Vapor Deposition ◽

Hexagonal Boron Nitride ◽

Cubic Boron Nitride ◽

Chemical Vapor ◽

Absorption Frequency ◽

Boron Nitride Films

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Correction to Catalytic Transparency of Hexagonal Boron Nitride on Copper for Chemical Vapor Deposition Growth of Large-Area and High-Quality Graphene

ACS Nano ◽

10.1021/nn503982j ◽

2014 ◽

Vol 8 (8) ◽

pp. 8711-8711 ◽

Author(s):

Min Wang ◽

Minwoo Kim ◽

Dorj Odkhuu ◽

Noejung Park ◽

Joohyun Lee ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Boron Nitride ◽

Vapor Deposition ◽

Hexagonal Boron Nitride ◽

Chemical Vapor ◽

High Quality ◽

Chemical Vapor Deposition Growth

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Catalytic Transparency of Hexagonal Boron Nitride on Copper for Chemical Vapor Deposition Growth of Large-Area and High-Quality Graphene

ACS Nano ◽

10.1021/nn501837c ◽

2014 ◽

Vol 8 (6) ◽

pp. 5478-5483 ◽

Author(s):

Min Wang ◽

Minwoo Kim ◽

Dorj Odkhuu ◽

Noejung Park ◽

Joohyun Lee ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Boron Nitride ◽

Vapor Deposition ◽

Hexagonal Boron Nitride ◽

Chemical Vapor ◽

High Quality ◽

Chemical Vapor Deposition Growth

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Growth of hexagonal boron nitride films on silicon substrates by low-pressure chemical vapor deposition

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-020-05116-6 ◽

2021 ◽

Author(s):

Xi Chen ◽

Chunbo Tan ◽

Xiaohang Liu ◽

Kairan Luan ◽

Yufeng Guan ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Boron Nitride ◽

Vapor Deposition ◽

Hexagonal Boron Nitride ◽

Chemical Vapor ◽

Low Pressure ◽

Silicon Substrates ◽

Pressure Chemical ◽

Boron Nitride Films

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