Residual compressive stress induced infrared-absorption frequency shift of hexagonal boron nitride in cubic boron nitride films prepared by plasma-enhanced chemical vapor deposition

2012 ◽  
Vol 112 (5) ◽  
pp. 053502 ◽  
Author(s):  
Yong Liu ◽  
Panpan Jin ◽  
Aili Chen ◽  
Hangsheng Yang ◽  
Yabo Xu
Keyword(s):  
Chemical Vapor Deposition ◽  
Boron Nitride ◽  
Frequency Shift ◽  
Infrared Absorption ◽  
Vapor Deposition ◽  
Hexagonal Boron Nitride ◽  
Cubic Boron Nitride ◽  
Chemical Vapor ◽  
Absorption Frequency ◽  
Boron Nitride Films

Thermal Stability of Cubic Boron Nitride Films Deposited by Chemical Vapor Deposition.

ChemInform ◽  
2007 ◽  
Vol 38 (2) ◽  
Author(s):  
J. Yu ◽  
Z. Zheng ◽  
H. C. Ong ◽  
K. Y. Wong ◽  
S. Matsumoto ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Chemical Vapor Deposition ◽  
Boron Nitride ◽  
Vapor Deposition ◽  
Cubic Boron Nitride ◽  
Chemical Vapor ◽  
Boron Nitride Films ◽  
Thermal Stability Of

Chemical Vapor Deposition and Etching of High-Quality Monolayer Hexagonal Boron Nitride Films

ACS Nano ◽  
2011 ◽  
Vol 5 (9) ◽  
pp. 7303-7309 ◽  
Author(s):  
Peter Sutter ◽  
Jayeeta Lahiri ◽  
Peter Albrecht ◽  
Eli Sutter
Keyword(s):  
Chemical Vapor Deposition ◽  
Boron Nitride ◽  
Vapor Deposition ◽  
Hexagonal Boron Nitride ◽  
Chemical Vapor ◽  
High Quality ◽  
Boron Nitride Films

Thermal Stability of Cubic Boron Nitride Films Deposited by Chemical Vapor Deposition

2006 ◽  
Vol 110 (42) ◽  
pp. 21073-21076 ◽  
Author(s):  
J. Yu ◽  
Z. Zheng ◽  
H. C. Ong ◽  
K. Y. Wong ◽  
S. Matsumoto ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Chemical Vapor Deposition ◽  
Boron Nitride ◽  
Vapor Deposition ◽  
Cubic Boron Nitride ◽  
Chemical Vapor ◽  
Boron Nitride Films ◽  
Thermal Stability Of
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