ALD/MLD processes for Mn and Co based hybrid thin films
Keyword(s):
New types of transition metal–organic hybrid thin films are fabricated with the emerging atomic/molecular layer deposition (ALD/MLD) technique through sequential gas-surface reactions from Mn(thd)3, Co(thd)2, Co(acac)3 and terephthalic acid (1,4-benzenedicarboxylic acid) precursors.
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2020 ◽
Vol 8
(5)
◽
pp. 2539-2548
◽
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Keyword(s):
2021 ◽
Vol 141
(4)
◽
pp. 568-569
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