scholarly journals Low-temperature chemical vapor deposition of cobalt oxide thin films from a dicobaltatetrahedrane precursor

RSC Advances ◽  
2017 ◽  
Vol 7 (79) ◽  
pp. 50269-50278 ◽  
Author(s):  
Marcel Melzer ◽  
Charan K. Nichenametla ◽  
Colin Georgi ◽  
Heinrich Lang ◽  
Stefan E. Schulz
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Cobalt Oxide ◽  
Vapor Deposition ◽  
Low Temperatures ◽  
Oxide Films ◽  
Chemical Vapor ◽  
Oxide Thin Films ◽  
P Application

Application of a novel liquid cobalt precursor, which forms cobalt oxide films at low temperatures using relatively simple CVD process.

Tailored synthesis of CoOX thin films for catalytic application

RSC Advances ◽  
2015 ◽  
Vol 5 (118) ◽  
pp. 97272-97278 ◽  
Author(s):  
Shi-Bin Fan ◽  
Guan-Fu Pan ◽  
Jing Liang ◽  
Zhen-Yu Tian
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Cobalt Oxide ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Oxide Thin Films ◽  
Catalytic Application ◽  
Inert Carrier

Cobalt oxide thin films were systematically synthesized on an inert carrier by pulsed-spray evaporation chemical vapor deposition (PSE-CVD).

Highly conformal magnesium oxide thin films by low-temperature chemical vapor deposition from Mg(H3BNMe2BH3)2 and water

2013 ◽  
Vol 102 (10) ◽  
pp. 101605 ◽  
Author(s):  
Wenjiao B. Wang ◽  
Yu Yang ◽  
Angel Yanguas-Gil ◽  
Noel N. Chang ◽  
Gregory S. Girolami ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Magnesium Oxide ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Oxide Thin Films

Composition and Microstructure of Cobalt Oxide Thin Films Obtained from a Novel Cobalt(II) Precursor by Chemical Vapor Deposition

2001 ◽  
Vol 13 (2) ◽  
pp. 588-593 ◽  
Author(s):  
Davide Barreca ◽  
Cristian Massignan ◽  
Sergio Daolio ◽  
Monica Fabrizio ◽  
Clara Piccirillo ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Cobalt Oxide ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Oxide Thin Films
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