Simultaneous improvement of the dielectric constant and leakage currents of ZrO2 dielectrics by incorporating a highly valent Ta5+ element
2018 ◽
Vol 6
(36)
◽
pp. 9794-9801
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Keyword(s):
Ta doping into ZrO2 suppresses the oxygen vacancy formation and changes the crystal structure, leading to simultaneous improvement of dielectric constant and leakage currents.
2014 ◽
Vol 118
(49)
◽
pp. 28776-28790
◽
2016 ◽
Vol 55
(2)
◽
pp. 021203
◽
2014 ◽
Vol 7
(1)
◽
pp. 730-737
◽
2018 ◽
Vol 101
(7)
◽
pp. 3118-3129
◽
Keyword(s):
2020 ◽
Vol 124
(19)
◽
pp. 10509-10522
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