Simultaneous improvement of the dielectric constant and leakage currents of ZrO2 dielectrics by incorporating a highly valent Ta5+ element

2018 ◽  
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Il-Kwon Oh ◽  
Jong Seo Park ◽  
Seunggi Seo ◽  
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...  

Ta doping into ZrO2 suppresses the oxygen vacancy formation and changes the crystal structure, leading to simultaneous improvement of dielectric constant and leakage currents.

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