Tantalum(v) 1,3-propanediolate β-diketonate solution as a precursor to sol–gel derived, metal oxide thin films
Keyword(s):
Sol Gel
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Synthesis of tantalum(v) 1,3-propanediolate β-diketonate solution and use in photochemical solution deposition to form tantalum oxide films.
2019 ◽
Vol 7
(42)
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pp. 24124-24149
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Keyword(s):
Conductive Perovskite-type Metal Oxide Thin Films Prepared by Chemical Solution Deposition Technique
2011 ◽
Vol 18
(9)
◽
pp. 092055