A Study on Three Dimensional Mask Effect of Attenuated Phase-Shift Mask in Advanced Optical Lithography
1998 ◽
Vol 41-42
◽
pp. 61-64
◽
1998 ◽
Vol 37
(Part 1, No. 12B)
◽
pp. 6714-6717
◽
2018 ◽
Vol 18
(01)
◽
pp. 1
◽
2006 ◽
Vol 126
(6)
◽
pp. 241-242
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