Influence of a DC, point-to-plane, low-pressure discharge in nitrogen on polystyrene thin films

2003 ◽  
Vol 22 (1) ◽  
pp. 51-60 ◽  
Author(s):  
P. Svarnas ◽  
N. Spyrou ◽  
B. Held
Keyword(s):  
Thin Films ◽  
Low Pressure ◽  
Pressure Discharge

A Novel Direct Liquid Injection Low Pressure Chemical Vapor Deposition System (DLI-LPCVD) for the Deposition of Thin Films

2017 ◽  
Vol 19 (8) ◽  
pp. 1700193 ◽  
Author(s):  
Mattias Vervaele ◽  
Bert De Roo ◽  
Jolien Debehets ◽  
Marilyne Sousa ◽  
Luman Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Liquid Injection ◽  
Pressure Chemical ◽  
Direct Liquid Injection
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