scholarly journals Development of a transparent single-grid-type MSGC based on LCD technology

2018 ◽  
Vol 174 ◽  
pp. 02004
Author(s):  
Hiroyuki Takahashi ◽  
Hiroaki Miyoshi ◽  
Lian Xuan ◽  
Yuki Mitsuya ◽  
Kenji Shimazoe ◽  
...  

We are developing a multi-grid-type MSGC based on the liquid crystal display (LCD) technology, which enables a large area and fine structure. Single-grid-type MSGC using transparent electrodes has been fabricated and successfully operated in several different gas mixtures. The use of LCD technology allows us to integrate some simple electronics using thin film transistors. Such an integrated device is our next target. The successful operation of Single-grid-type MSGC is the very important first step for us.

1992 ◽  
Vol 31 (Part 1, No. 12B) ◽  
pp. 4559-4562 ◽  
Author(s):  
Yutaka Miyata ◽  
Mamoru Furuta ◽  
Tatsuo Yoshioka ◽  
Tetsuya Kawamura

1985 ◽  
Vol 49 ◽  
Author(s):  
J. Allison ◽  
D.P. Turner ◽  
D.C. Cousins

AbstractPrototype thin film transistors have previously been fabricated by r.f. magnetron sputtering of a-Si:H on to CVD Si02 using a crystalline silicon gate. These devices exhibited an on/off current ratio of four orders of magnitude for gate voltages as low as 10 volts. This demonstrated the suitability of the sputtered layer for liquid crystal display applications.The use of a crystalline substrate negates the advantages of using a thin film,such as large area capability and low cost, so we have turned our attention to the provision of a sputtered dielectric. Several candidate materials have been considered, including Si02, Si3N4, Ta205, AIN and Ti02. We present the characteristics of our first all-sputtered transistor utilising an Si02 gate,and assess the dielectric properties and potential of other materials, with emphasis on the silicon oxynitride system.


2015 ◽  
Vol 36 (6) ◽  
pp. 585-587 ◽  
Author(s):  
Seung-Hyuck Lee ◽  
Jongbin Kim ◽  
Seong Ho Yoon ◽  
Kyeong-Ah Kim ◽  
Sung-Min Yoon ◽  
...  

1991 ◽  
Vol 30 (Part 1, No. 11B) ◽  
pp. 3302-3307 ◽  
Author(s):  
Keiji Tanaka ◽  
Shiro Suyama ◽  
Kinya Kato

2008 ◽  
Vol 16 (12) ◽  
pp. 1251 ◽  
Author(s):  
Yoshihide Fujisaki ◽  
Hiroto Sato ◽  
Tatsuya Takei ◽  
Toshihiro Yamamoto ◽  
Hideo Fujikake ◽  
...  

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