ENERGY DISTRIBUTION OF ION BEAM FROM VARIOUS LIQUID METAL ION SOURCES

1987 ◽  
Vol 48 (C6) ◽  
pp. C6-147-C6-152 ◽  
Author(s):  
H. Arimoto ◽  
E. Miyauchi ◽  
H. Hashimoto ◽  
M. Komuro
Keyword(s):  
Liquid Metal ◽  
Energy Distribution ◽  
Metal Ion ◽  
Ion Beam ◽  
Ion Sources

Development of Liquid‐Metal‐Ion Sources for Focused‐Ion‐Beam Applications

1989 ◽  
Vol 136 (11) ◽  
pp. 3502-3505 ◽  
Author(s):  
T. Ishitani ◽  
K. Umemura ◽  
Y. Kawanami ◽  
T. Ohnishi
Keyword(s):  
Liquid Metal ◽  
Metal Ion ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Ion Sources

ENERGY SPREADS IN FIELD EVAPORATION AND LIQUID-METAL ION SOURCES

1984 ◽  
Vol 45 (C9) ◽  
pp. C9-179-C9-182
Author(s):  
G. L.R. Mair ◽  
T. Mulvey ◽  
R. G. Forbes
Keyword(s):  
Liquid Metal ◽  
Metal Ion ◽  
Ion Sources ◽  
Field Evaporation

Ga-ion beam surface modification of glass using a custom-built liquid metal ion beam

2022 ◽  
Vol 131 (1) ◽  
pp. 014901
Author(s):  
Byeong Jun Cha ◽  
Woo Jun Byeon ◽  
Chang Min Choi ◽  
Boo Ki Min ◽  
Jinwan Cho ◽  
...  
Keyword(s):  
Surface Modification ◽  
Liquid Metal ◽  
Metal Ion ◽  
Ion Beam ◽  
Beam Surface
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