Energy distribution properties of focused ion beams from liquid metal ion sources

1995 ◽  
Author(s):  
H.S. Uhm ◽  
E.H. Choi ◽  
G.S. Cho ◽  
S.O. Kang
Keyword(s):  
Liquid Metal ◽  
Energy Distribution ◽  
Metal Ion ◽  
Ion Beams ◽  
Ion Sources ◽  
Focused Ion Beams

ENERGY DISTRIBUTION OF ION BEAM FROM VARIOUS LIQUID METAL ION SOURCES

1987 ◽  
Vol 48 (C6) ◽  
pp. C6-147-C6-152 ◽  
Author(s):  
H. Arimoto ◽  
E. Miyauchi ◽  
H. Hashimoto ◽  
M. Komuro
Keyword(s):  
Liquid Metal ◽  
Energy Distribution ◽  
Metal Ion ◽  
Ion Beam ◽  
Ion Sources

ENERGY SPREADS IN FIELD EVAPORATION AND LIQUID-METAL ION SOURCES

1984 ◽  
Vol 45 (C9) ◽  
pp. C9-179-C9-182
Author(s):  
G. L.R. Mair ◽  
T. Mulvey ◽  
R. G. Forbes
Keyword(s):  
Liquid Metal ◽  
Metal Ion ◽  
Ion Sources ◽  
Field Evaporation
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