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Over 245 mW 1.3 μm buried ridge stripe laser diodes onn‐substrate fabricated by the reactive ion beam etching technique
Applied Physics Letters
◽
10.1063/1.105565
◽
1991
◽
Vol 59
(1)
◽
pp. 22-24
◽
Cited By ~ 32
Author(s):
N. Bouadma
◽
C. Kazmierski
◽
J. Semo
Keyword(s):
Ion Beam
◽
Laser Diodes
◽
Etching Technique
◽
Ion Beam Etching
◽
Stripe Laser
◽
Reactive Ion Beam Etching
Download Full-text
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References
Reactive Ion Beam Etching and Overgrowth Process in the Fabrication of InGaN Inner Stripe Laser Diodes
Japanese Journal of Applied Physics
◽
10.1143/jjap.37.1470
◽
1998
◽
Vol 37
(Part 1, No. 3B)
◽
pp. 1470-1473
◽
Cited By ~ 10
Author(s):
Shin-ya Nunoue
◽
Masahiro Yamamoto
◽
Mariko Suzuki
◽
Chiharu Nozaki
◽
Joji Nishio
◽
...
Keyword(s):
Ion Beam
◽
Laser Diodes
◽
Ion Beam Etching
◽
Stripe Laser
◽
Reactive Ion Beam Etching
Download Full-text
Reactive Ion Beam Etching and Overgrowth Process for Fabrication of InGaN Inner Stripe Laser Diodes
10.7567/ssdm.1997.c-6-8
◽
1997
◽
Cited By ~ 1
Author(s):
Shin-ya Nunoue
◽
Masahiro Yamamoto
◽
Mariko Suzuki
◽
Chiharu Nozaki
◽
Joji Nishio
◽
...
Keyword(s):
Ion Beam
◽
Laser Diodes
◽
Ion Beam Etching
◽
Stripe Laser
◽
Reactive Ion Beam Etching
Download Full-text
GalnAsP/l Short Cavity Laser Diodes With Facet Mirrors Etched By Chlorine Gas Reactive Ion Beam Etching
LEOS 1991 Summer Topical Meetings on Epitaxial Materials and In-Situ Processing for Optoelectronic Devices. Photonics and Optoelectronics
◽
10.1109/leosst.1991.639013
◽
2005
◽
Author(s):
M. Iwase
◽
N. Matsumoto
◽
A. Kasukawa
Keyword(s):
Ion Beam
◽
Laser Diodes
◽
Ion Beam Etching
◽
Chlorine Gas
◽
Cavity Laser
◽
Reactive Ion Beam Etching
Download Full-text
650nm-Band High Power AlGaInP Visible Laser Diodes Fabricated by Reactive Ion Beam Etching Using Cl2/N2 Mixture
10.7567/ssdm.1996.pc-7-4
◽
1996
◽
Author(s):
Isao KIDOGUCHI
◽
Hideto ADACHI
◽
Kiyotake TANAKA
◽
Toshiya FUKUHISA
◽
Masaya MANNOH
◽
...
Keyword(s):
High Power
◽
Ion Beam
◽
Laser Diodes
◽
Ion Beam Etching
◽
Visible Laser
◽
Reactive Ion Beam Etching
Download Full-text
High-Power 650-nm-Band AlGaInP Visible Laser Diodes Fabricated by Reactive Ion Beam Etching Using Cl2/N2Mixture
Japanese Journal of Applied Physics
◽
10.1143/jjap.36.1892
◽
1997
◽
Vol 36
(Part 1, No. 3B)
◽
pp. 1892-1895
◽
Cited By ~ 1
Author(s):
Isao Kidoguchi
◽
Hideto Adachi
◽
Kiyotake Tanaka
◽
Toshiya Fukuhisa
◽
Masaya Mannoh
◽
...
Keyword(s):
High Power
◽
Ion Beam
◽
Laser Diodes
◽
Ion Beam Etching
◽
Visible Laser
◽
Reactive Ion Beam Etching
Download Full-text
New fabrication method for 1.3‐μm GaInAsP/InP buried crescent lasers using a reactive ion beam etching technique
Applied Physics Letters
◽
10.1063/1.98518
◽
1987
◽
Vol 51
(22)
◽
pp. 1774-1776
◽
Cited By ~ 3
Author(s):
Akihiko Kasukawa
◽
Masayuki Iwase
◽
Yuji Hiratani
◽
Narihito Matsumoto
◽
Yoshikazu Ikegami
◽
...
Keyword(s):
Ion Beam
◽
Fabrication Method
◽
Etching Technique
◽
Ion Beam Etching
◽
Reactive Ion Beam Etching
Download Full-text
Reactive-ion-beam etching of InP in a chlorine–hydrogen mixture
Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena
◽
10.1116/1.587515
◽
1994
◽
Vol 12
(6)
◽
pp. 3374
◽
Cited By ~ 16
Author(s):
G. Allen Vawter
Keyword(s):
Ion Beam
◽
Ion Beam Etching
◽
Hydrogen Mixture
◽
Reactive Ion Beam Etching
Download Full-text
Reactive Ion Beam Etching Using a Selective Gallium Doping Method
Japanese Journal of Applied Physics
◽
10.1143/jjap.28.l1671
◽
1989
◽
Vol 28
(Part 2, No. 9)
◽
pp. L1671-L1672
Author(s):
Kyusaku Nishioka
◽
Hiroaki Morimoto
◽
Yoji Mashiko
◽
Tadao Kato
Keyword(s):
Ion Beam
◽
Ion Beam Etching
◽
Gallium Doping
◽
Reactive Ion Beam Etching
Download Full-text
GaAs and AlGaAs anisotropic fine pattern etching using a new reactive ion beam etching system
Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena
◽
10.1116/1.583273
◽
1985
◽
Vol 3
(1)
◽
pp. 402
◽
Cited By ~ 57
Author(s):
K. Asakawa
Keyword(s):
Ion Beam
◽
Ion Beam Etching
◽
Fine Pattern
◽
Etching System
◽
Reactive Ion Beam Etching
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High-quality Au/BIG/GGG magnetoplasmonic crystals fabricated by a combined ion-beam etching technique
Optical Materials Express
◽
10.1364/ome.5.001647
◽
2015
◽
Vol 5
(7)
◽
pp. 1647
◽
Cited By ~ 9
Author(s):
A. L. Chekhov
◽
V. L. Krutyanskiy
◽
V. A. Ketsko
◽
A. I. Stognij
◽
T. V. Murzina
Keyword(s):
Ion Beam
◽
High Quality
◽
Etching Technique
◽
Ion Beam Etching
Download Full-text
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