scholarly journals High-quality Au/BIG/GGG magnetoplasmonic crystals fabricated by a combined ion-beam etching technique

2015 ◽  
Vol 5 (7) ◽  
pp. 1647 ◽  
Author(s):  
A. L. Chekhov ◽  
V. L. Krutyanskiy ◽  
V. A. Ketsko ◽  
A. I. Stognij ◽  
T. V. Murzina
Keyword(s):  
Ion Beam ◽  
High Quality ◽  
Etching Technique ◽  
Ion Beam Etching

Electric-field modulation of a Bi-Sr-Ca-Cu-O film with a polymer film as an insulator

1989 ◽  
Vol 169 ◽  
Author(s):  
Shin'ichi Morohashi ◽  
Hideo Suzuki ◽  
Kohtaroh Gotoh ◽  
Norio Fujimaki ◽  
Shinya Hasuo
Keyword(s):  
Electric Field ◽  
Polymer Film ◽  
Ion Beam ◽  
Gate Insulator ◽  
Ion Beam Sputtering ◽  
Gate Electrode ◽  
Etching Technique ◽  
Ion Beam Etching ◽  
Beam Sputtering ◽  
Field Modulation

AbstractWe fabricated the multi layered structure with Au gate electrode/polymer film/Bi-Sr-Ca-Cu-O film to study the electric-field control of high Tc superconductor. A Bi-Sr-Ca-Cu-O(BSCCO) film was fabricated using an ion beam sputtering technique. The plasma polymerization using trif luoroethane gas was used to make the gate insulator. The patterning of the BSCCO film was carried out using an ion beam etching technique. The supercurrent of the structure decreased when the gate voltage was applied to the gate electrode.

Chemically assisted ion beam etching process for high quality laser mirrors

1989 ◽  
Vol 9 (1-4) ◽  
pp. 485-489 ◽  
Author(s):  
P. Buchmann ◽  
H.P. Dietrich ◽  
G. Sasso ◽  
P. Vettiger
Keyword(s):  
Ion Beam ◽  
Etching Process ◽  
High Quality ◽  
Ion Beam Etching
Sign in / Sign up

Export Citation Format

Share Document