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Defect generation in 3.5 nm silicon dioxide films
Applied Physics Letters
◽
10.1063/1.112854
◽
1994
◽
Vol 65
(14)
◽
pp. 1820-1822
◽
Cited By ~ 29
Author(s):
D. A. Buchanan
◽
D. J. DiMaria
◽
C‐A. Chang
◽
Y. Taur
Keyword(s):
Silicon Dioxide
◽
Defect Generation
◽
Silicon Dioxide Films
Download Full-text
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References
Anode hole injection, defect generation, and breakdown in ultrathin silicon dioxide films
Journal of Applied Physics
◽
10.1063/1.1363680
◽
2001
◽
Vol 89
(9)
◽
pp. 5015-5024
◽
Cited By ~ 94
Author(s):
D. J. DiMaria
◽
J. H. Stathis
Keyword(s):
Silicon Dioxide
◽
Hole Injection
◽
Defect Generation
◽
Silicon Dioxide Films
◽
Anode Hole
◽
Anode Hole Injection
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Defect generation in ultrathin silicon dioxide films produced by anode hole injection
Applied Physics Letters
◽
10.1063/1.1320460
◽
2000
◽
Vol 77
(17)
◽
pp. 2716-2718
◽
Cited By ~ 21
Author(s):
D. J. DiMaria
Keyword(s):
Silicon Dioxide
◽
Hole Injection
◽
Defect Generation
◽
Silicon Dioxide Films
◽
Anode Hole
◽
Anode Hole Injection
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Measurements and Modelling of Thin Silicon Dioxide Films on Silicon
10.21236/ada207853
◽
1989
◽
Author(s):
A. Kalnitsky
◽
S. P. Tay
◽
J. P. Ellul
◽
J. W. Andrews
◽
E. A. Irene
◽
...
Keyword(s):
Silicon Dioxide
◽
Silicon Dioxide Films
◽
Thin Silicon
Download Full-text
Rapid photochemical deposition of silicon dioxide films using an excimer lamp
Journal of Applied Physics
◽
10.1063/1.357326
◽
1994
◽
Vol 76
(7)
◽
pp. 4372-4376
◽
Cited By ~ 25
Author(s):
Philippe Bergonzo
◽
Ian W. Boyd
Keyword(s):
Silicon Dioxide
◽
Excimer Lamp
◽
Silicon Dioxide Films
◽
Photochemical Deposition
Download Full-text
Selection and characteristics of peptides that bind thermally grown silicon dioxide films
Biomolecular Engineering
◽
10.1016/j.bioeng.2005.09.004
◽
2005
◽
Vol 22
(5-6)
◽
pp. 201-204
◽
Cited By ~ 44
Author(s):
Edward Eteshola
◽
Leonard J. Brillson
◽
Stephen Craig Lee
Keyword(s):
Silicon Dioxide
◽
Silicon Dioxide Films
◽
Thermally Grown
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Characterization of Tunneling Current through Ultrathin Silicon Dioxide Films by Different-Metal Gates Method
Japanese Journal of Applied Physics
◽
10.1143/jjap.47.8317
◽
2008
◽
Vol 47
(11)
◽
pp. 8317-8320
Author(s):
Takaaki Hirokane
◽
Naoto Yoshii
◽
Tatsuya Okazaki
◽
Shinichi Urabe
◽
Kazuo Nishimura
◽
...
Keyword(s):
Silicon Dioxide
◽
Tunneling Current
◽
Metal Gates
◽
Silicon Dioxide Films
Download Full-text
Gas Permeation Study and Imperfection Detection of Thermally Grown and Deposited Thin Silicon Dioxide Films
Journal of The Electrochemical Society
◽
10.1149/1.2425375
◽
1962
◽
Vol 109
(3)
◽
pp. 221
◽
Cited By ~ 36
Author(s):
S. W. Ing
◽
R. E. Morrison
◽
J. E. Sandor
Keyword(s):
Silicon Dioxide
◽
Gas Permeation
◽
Silicon Dioxide Films
◽
Permeation Study
◽
Thin Silicon
◽
Thermally Grown
Download Full-text
Modeling the breakdown spots in silicon dioxide films as point contacts
Applied Physics Letters
◽
10.1063/1.124566
◽
1999
◽
Vol 75
(7)
◽
pp. 959-961
◽
Cited By ~ 31
Author(s):
J. Suñé
◽
E. Miranda
◽
M. Nafría
◽
X. Aymerich
Keyword(s):
Silicon Dioxide
◽
Point Contacts
◽
Silicon Dioxide Films
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Dielectric breakdown properties in silicon dioxide films
Microelectronics Reliability
◽
10.1016/0026-2714(76)90572-2
◽
1976
◽
Vol 15
(5)
◽
pp. 381
Keyword(s):
Silicon Dioxide
◽
Dielectric Breakdown
◽
Silicon Dioxide Films
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Thermal nitridation of silicon dioxide films
Vacuum
◽
10.1016/0042-207x(89)90511-3
◽
1989
◽
Vol 39
(5)
◽
pp. 517
Keyword(s):
Silicon Dioxide
◽
Silicon Dioxide Films
◽
Thermal Nitridation
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