Growth of clean amorphous silicon–carbon alloy films by hot‐filament assisted chemical vapor deposition technique
1998 ◽
Vol 106
(1240)
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pp. 1167-1171
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2013 ◽
Vol 273
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pp. 730-734
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2005 ◽
Vol 61
(a1)
◽
pp. c443-c444
2015 ◽
Vol 609
(1)
◽
pp. 228-234
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2014 ◽
Vol 2014
◽
pp. 1-4
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