Negative metal‐ion source for secondary‐ion mass spectrometry

1993 ◽  
Vol 64 (5) ◽  
pp. 1146-1149 ◽  
Author(s):  
Hisayoshi Yurimoto ◽  
Yoshiharu Mori ◽  
Hironori Yamamoto
Keyword(s):  
Mass Spectrometry ◽  
Metal Ion ◽  
Secondary Ion Mass Spectrometry ◽  
Ion Source ◽  
Ion Mass Spectrometry ◽  
Secondary Ion

Cesium liquid metal ion source for secondary ion mass spectrometry

1994 ◽  
Vol 65 (7) ◽  
pp. 2276-2280 ◽  
Author(s):  
Kaoru Umemura ◽  
Hiroyasu Shichi ◽  
Setsuo Nomura
Keyword(s):  
Mass Spectrometry ◽  
Liquid Metal ◽  
Metal Ion ◽  
Secondary Ion Mass Spectrometry ◽  
Ion Source ◽  
Ion Mass Spectrometry ◽  
Secondary Ion

A test apparatus for secondary ion mass spectrometry

1983 ◽  
Vol 61 (4) ◽  
pp. 535-542 ◽  
Author(s):  
N. Klaus ◽  
J. D. Brown
Keyword(s):  
Mass Spectrometry ◽  
Secondary Ion Mass Spectrometry ◽  
Low Cost ◽  
Ion Source ◽  
Channel Electron Multiplier ◽  
Electron Multiplier ◽  
Spherical Source ◽  
Ion Mass Spectrometry ◽  
Cylindrical Source ◽  
Secondary Ion

A low cost test device for secondary ion mass spectrometry (SIMS) components is described. It consists of a turbomolecular pumped vessel containing an insulated sample stage on an x−y manipulator, extraction optics, quadrupole mass filter, and channel electron multiplier. The construction and characteristics of a cylindrical and a spherical saddlefield ion source are described. The output of the cylindrical source is 10−4 A cm−2 whereas that of the spherical source is in the order of 10−3 A cm−2 at voltages up to 9 kV and at a beam divergence of 4°.

scholarly journals New Cs sputter ion source with polyatomic ion beams for secondary ion mass spectrometry applications

2007 ◽  
Vol 78 (8) ◽  
pp. 085101 ◽  
Author(s):  
S. F. Belykh ◽  
V. V. Palitsin ◽  
I. V. Veryovkin ◽  
A. P. Kovarsky ◽  
R. J. H. Chang ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Secondary Ion Mass Spectrometry ◽  
Ion Beams ◽  
Ion Source ◽  
Ion Mass Spectrometry ◽  
Secondary Ion
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