Optical emission spectroscopy studies of the effects of nitrogen addition on diamond synthesis in a CH4–CO2 gas mixture

1995 ◽  
Vol 67 (15) ◽  
pp. 2149-2151 ◽  
Author(s):  
Tsao‐Ming Hong ◽  
Sheng‐Hsiung Chen ◽  
Yih‐Song Chiou ◽  
Chia‐Fu Chen
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Nitrogen Addition ◽  
Gas Mixture ◽  
Diamond Synthesis ◽  
Co2 Gas ◽  
Spectroscopy Studies

Langmuir Probe and Optical Emission Spectroscopy Studies of Low-Pressure Gas Mixture of CO2and N2

2010 ◽  
Vol 12 (3) ◽  
pp. 314-319 ◽  
Author(s):  
E. F Mendez-Martinez ◽  
P. G Reyes ◽  
D Osorio-Gonzalez ◽  
F Castillo ◽  
H Martinez
Keyword(s):  
Langmuir Probe ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Low Pressure ◽  
Gas Mixture ◽  
Spectroscopy Studies

Optical Emission Spectroscopy Measurement of Ar\H2\CH4 RF Plasma for Nano-Crystal Diamond Film Deposition

2014 ◽  
Vol 1035 ◽  
pp. 373-378 ◽  
Author(s):  
Yan Chao Shi ◽  
Qin Jian Zhang ◽  
Jia Jun Li ◽  
Guang Chao Chen
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Diamond Films ◽  
Optical Emission ◽  
Film Deposition ◽  
Rf Plasma ◽  
Gas Mixture ◽  
Technical Application ◽  
Plasma Enhanced Cvd ◽  
Nano Crystal

Ar\H2\CH4 gas mixture was utilized to grow nanocrystal diamond films in a RF plasma enhanced CVD system. CH4\ H2 ratios were changed to study the effect of plasma radicals on the deposit, in which optical emission spectroscopy (OES) was applied to analyze the plasma radicals. It was found that Hα, Hβ, Hγ, CH, C2 were the main radicals in the plasma. Among them, the CH intensity of OES was usually quite strong and increased sharply when the ratio of CH4/H2 was greater than 3%. The intensity of C2 was weak and basically unchanged with the addition of methane. This study can provide a new possible technical application for depositing NCD films.

Mass and optical emission spectroscopy of plasmas for diamond synthesis

1994 ◽  
Vol 66 (6) ◽  
pp. 1195-1205 ◽  
Author(s):  
Carsten Benndorf ◽  
Pierre Joeris ◽  
Roland Kroger
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Diamond Synthesis

Optical Emission Spectroscopy Studies in ECR Plasma Used for the Deposition of Silicon Oxide Film

2013 ◽  
Vol 52 (1) ◽  
pp. 473-481
Author(s):  
Y.-L. Hsieh ◽  
S.-Y. Chang ◽  
T. T. Li ◽  
L.-C. Hu ◽  
C. C. Lee ◽  
...  
Keyword(s):  
Oxide Film ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Silicon Oxide ◽  
Optical Emission ◽  
Silicon Oxide Film ◽  
Ecr Plasma ◽  
Spectroscopy Studies
Sign in / Sign up

Export Citation Format

Share Document