Determination of fluorine atom density in reactive plasmas by vacuum ultraviolet absorption spectroscopy at 95.85 nm
1999 ◽
Vol 70
(1)
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pp. 76-81
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1997 ◽
Vol 36
(Part 2, No. 9A/B)
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pp. L1261-L1264
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2003 ◽
Vol 74
(7)
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pp. 3453-3459
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2019 ◽
2019 ◽
2019 ◽
1994 ◽
Vol 101
(7)
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pp. 5523-5528
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