Comparison of the Fluorine Atom Density Measured by Actinometry and Vacuum Ultraviolet Absorption Spectroscopy

Japanese Journal of Applied Physics ◽

10.1143/jjap.36.l1261 ◽

1997 ◽

Vol 36 (Part 2, No. 9A/B) ◽

pp. L1261-L1264 ◽

Author(s):

Yozo Kawai ◽

Koichi Sasaki ◽

Kiyoshi Kadota

Keyword(s):

Absorption Spectroscopy ◽

Fluorine Atom ◽

Vacuum Ultraviolet ◽

Ultraviolet Absorption ◽

Atom Density ◽

Ultraviolet Absorption Spectroscopy

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Determination of fluorine atom density in reactive plasmas by vacuum ultraviolet absorption spectroscopy at 95.85 nm

Review of Scientific Instruments ◽

10.1063/1.1149543 ◽

1999 ◽

Vol 70 (1) ◽

pp. 76-81 ◽

Author(s):

K. Sasaki ◽

Y. Kawai ◽

K. Kadota

Keyword(s):

Absorption Spectroscopy ◽

Fluorine Atom ◽

Vacuum Ultraviolet ◽

Ultraviolet Absorption ◽

Atom Density ◽

Ultraviolet Absorption Spectroscopy

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Measurement of oxygen atom density employing vacuum ultraviolet absorption spectroscopy with microdischarge hollow cathode lamp

Review of Scientific Instruments ◽

10.1063/1.1582386 ◽

2003 ◽

Vol 74 (7) ◽

pp. 3453-3459 ◽

Author(s):

Hisao Nagai ◽

Mineo Hiramatsu ◽

Masaru Hori ◽

Toshio Goto

Keyword(s):

Oxygen Atom ◽

Absorption Spectroscopy ◽

Hollow Cathode ◽

Vacuum Ultraviolet ◽

Ultraviolet Absorption ◽

Atom Density ◽

Hollow Cathode Lamp ◽

Ultraviolet Absorption Spectroscopy

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Measurement and control of absolute nitrogen atom density in an electron-beam-excited plasma using vacuum ultraviolet absorption spectroscopy

Journal of Applied Physics ◽

10.1063/1.1305559 ◽

2000 ◽

Vol 88 (4) ◽

pp. 1756-1759 ◽

Author(s):

Shigekazu Tada ◽

Seigou Takashima ◽

Masafumi Ito ◽

Masaru Hori ◽

Toshio Goto ◽

...

Keyword(s):

Electron Beam ◽

Nitrogen Atom ◽

Absorption Spectroscopy ◽

Vacuum Ultraviolet ◽

Ultraviolet Absorption ◽

Atom Density ◽

Ultraviolet Absorption Spectroscopy ◽

And Control ◽

Measurement And Control

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Predissociation supported high‐resolution vacuum ultraviolet absorption spectroscopy of excited electronic states of NH3

The Journal of Chemical Physics ◽

10.1063/1.467341 ◽

1994 ◽

Vol 101 (7) ◽

pp. 5523-5528 ◽

Author(s):

Xinghua Li ◽

Carl Rudolf Vidal

Keyword(s):

High Resolution ◽

Absorption Spectroscopy ◽

Vacuum Ultraviolet ◽

Electronic States ◽

Ultraviolet Absorption ◽

Excited Electronic States ◽

Ultraviolet Absorption Spectroscopy

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ChemInform Abstract: Predissociation Supported High-Resolution Vacuum Ultraviolet Absorption Spectroscopy of Excited Electronic States of NH3.

10.1002/chin.199503006 ◽

2010 ◽

Vol 26 (3) ◽

pp. no-no

Author(s):

X. LI ◽

C. R. VIDAL

Keyword(s):

High Resolution ◽

Absorption Spectroscopy ◽

Vacuum Ultraviolet ◽

Electronic States ◽

Ultraviolet Absorption ◽

Excited Electronic States ◽

Ultraviolet Absorption Spectroscopy

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Vacuum ultraviolet absorption spectroscopy for absolute density measurements of fluorine atoms in fluorocarbon plasmas

Applied Physics Letters ◽

10.1063/1.118582 ◽

1997 ◽

Vol 70 (11) ◽

pp. 1375-1377 ◽

Author(s):

K. Sasaki ◽

Y. Kawai ◽

K. Kadota

Keyword(s):

Absorption Spectroscopy ◽

Vacuum Ultraviolet ◽

Ultraviolet Absorption ◽

Density Measurements ◽

Fluorocarbon Plasmas ◽

Absolute Density ◽

Ultraviolet Absorption Spectroscopy

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Vacuum ultraviolet absorption spectroscopy employing a microdiacharge hollow-cathode lamp for absolute density measurements of hydrogen atoms in reactive plasmas

Applied Physics Letters ◽

10.1063/1.125497 ◽

1999 ◽

Vol 75 (25) ◽

pp. 3929-3931 ◽

Author(s):

Seigou Takashima ◽

Masaru Hori ◽

Toshio Goto ◽

Akihiro Kono ◽

Masafumi Ito ◽

...

Keyword(s):

Absorption Spectroscopy ◽

Hollow Cathode ◽

Vacuum Ultraviolet ◽

Ultraviolet Absorption ◽

Hydrogen Atoms ◽

Density Measurements ◽

Hollow Cathode Lamp ◽

Absolute Density ◽

Ultraviolet Absorption Spectroscopy

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PH3Concentration Measurements by Vacuum Ultraviolet Absorption Spectroscopy

Japanese Journal of Applied Physics ◽

10.1143/jjap.19.779 ◽

1980 ◽

Vol 19 (4) ◽

pp. 779-780 ◽

Author(s):

Noriaki Honma ◽

Isao Sugaya ◽

Katsumi Takami

Keyword(s):

Absorption Spectroscopy ◽

Vacuum Ultraviolet ◽

Ultraviolet Absorption ◽

Ultraviolet Absorption Spectroscopy

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Formation and Diagnostics of Plasmas and Radicals. Measurement of Absolute Density of Atomic Species Using Vacuum Ultraviolet Absorption Spectroscopy with Microdischage Lamp.

Shinku ◽

10.3131/jvsj.44.802 ◽

2001 ◽

Vol 44 (9) ◽

pp. 802-807

Author(s):

Seigou TAKASHIMA ◽

Masaru HORI ◽

Toshio GOTO

Keyword(s):

Absorption Spectroscopy ◽

Vacuum Ultraviolet ◽

Ultraviolet Absorption ◽

Absolute Density ◽

Ultraviolet Absorption Spectroscopy ◽

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Development of measurement technique for carbon atoms employing vacuum ultraviolet absorption spectroscopy with a microdischarge hollow-cathode lamp and its application to diagnostics of nanographene sheet material formation plasmas

Journal of Applied Physics ◽

10.1063/1.3091279 ◽

2009 ◽

Vol 105 (11) ◽

pp. 113305 ◽

Author(s):

Wakana Takeuchi ◽

Hajime Sasaki ◽

Satoru Kato ◽

Seigo Takashima ◽

Mineo Hiramatsu ◽

...

Keyword(s):

Absorption Spectroscopy ◽

Measurement Technique ◽

Hollow Cathode ◽

Vacuum Ultraviolet ◽

Sheet Material ◽

Ultraviolet Absorption ◽

Hollow Cathode Lamp ◽

Ultraviolet Absorption Spectroscopy ◽

Material Formation

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