Experimental studies on a compact electron cyclotron resonance plasma x-ray source

1999 ◽  
Vol 70 (6) ◽  
pp. 2637-2645 ◽  
Author(s):  
R. Baskaran ◽  
T. S. Selvakumaran
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Experimental Studies ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
X Ray ◽  
Resonance Plasma

Electron Cyclotron Resonance Plasma Etching of α-Ta for X-Ray Mask Absorber Using Chlorine and Fluoride Gas Mixture

2000 ◽  
Vol 39 (Part 1, No. 12B) ◽  
pp. 6914-6918 ◽  
Author(s):  
Tai Tsuchizawa ◽  
Hiroki Iriguchi ◽  
Chiharu Takahashi ◽  
Masaru Shimada ◽  
Shingo Uchiyama ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Gas Mixture ◽  
Electron Cyclotron Resonance Plasma ◽  
X Ray ◽  
Resonance Plasma

Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

1990 ◽  
Vol 56 (15) ◽  
pp. 1424-1426 ◽  
Author(s):  
S. J. Pearton ◽  
U. K. Chakrabarti ◽  
A. P. Kinsella ◽  
D. Johnson ◽  
C. Constantine
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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