Ion energy and charge state distributions in zirconium nitride arc plasma

2003 ◽  
Vol 83 (8) ◽  
pp. 1542-1544 ◽  
Author(s):  
Manish Chhowalla
Author(s):  
P. Scharrer ◽  
Ch. E. Düllmann ◽  
W. Barth ◽  
J. Khuyagbaatar ◽  
A. Yakushev ◽  
...  

1981 ◽  
Vol 23 (3) ◽  
pp. 957-966 ◽  
Author(s):  
J. A. Golovchenko ◽  
A. N. Goland ◽  
J. S. Rosner ◽  
C. E. Thorn ◽  
H. E. Wegner ◽  
...  

1996 ◽  
Vol 67 (6) ◽  
pp. 2415-2416
Author(s):  
Mamoru Sakaki ◽  
Tateki Sakakibara

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