Langmuir probe measurement of electron temperature in high‐pressure plasmas

1973 ◽  
Vol 44 (8) ◽  
pp. 3550-3556 ◽  
Author(s):  
R. M. Clements ◽  
P. R. Smy
1988 ◽  
Vol 59 (9) ◽  
pp. 2002-2007 ◽  
Author(s):  
Haruo Shindo ◽  
Masayoshi Konishi ◽  
Takeshi Tamaru

1992 ◽  
Vol 63 (10) ◽  
pp. 4608-4610 ◽  
Author(s):  
H. Y. W. Tsui ◽  
R. D. Bengtson ◽  
G. X. Li ◽  
H. Lin ◽  
M. Meier ◽  
...  

2015 ◽  
Vol 42 (21) ◽  
pp. 8846-8853 ◽  
Author(s):  
R. E. Ergun ◽  
M. W. Morooka ◽  
L. A. Andersson ◽  
C. M. Fowler ◽  
G. T. Delory ◽  
...  

2019 ◽  
Vol 13 (27) ◽  
pp. 76-82
Author(s):  
Kadhim A. Aadim

Low-pressure capacitively coupled RF discharge Ar plasma has been studied using Langmuir probe. The electron temperature, electron density and Debay length were calculated under different pressures and electrode gap. In this work the RF Langmuir probe is designed using 4MHz filter as compensation circuit and I-V probe characteristic have been investigated. The pressure varied from 0.07 mbar to 0.1 mbar while electrode gap varied from 2-5 cm. The plasma was generated using power supply at 4MHz frequency with power 300 W. The flowmeter is used to control Argon gas flow in the range of 600 standard cubic centimeters per minute (sccm). The electron temperature drops slowly with pressure and it's gradually decreased when expanding the electrode gap. As the gas pressure increases, the plasma density rises slightly at low gas pressure while it drops little at higher gas pressure. The electron density decreases rapidly with expand distances between electrodes.


2014 ◽  
Vol 47 (40) ◽  
pp. 405205 ◽  
Author(s):  
P Pira ◽  
T Burian ◽  
A Kolpaková ◽  
M Tichý ◽  
P Kudrna ◽  
...  

2008 ◽  
Vol 26 (3) ◽  
pp. 533-541 ◽  
Author(s):  
K.-I. Oyama ◽  
T. Abe ◽  
H. Mori ◽  
J. Y. Liu

Abstract. Electron temperature in the sporadic E layer was measured with a glass-sealed Langmuir probe at a mid-latitude station in Japan in the framework of the SEEK (Sporadic E Experiment over Kyushu)-2 campaign which was conducted in August 2002. Important findings are two fold: (1) electron temperature and electron density vary in the opposite sense in the height range of 100–108 km, and electron temperature in the Es layer is lower than that of ambient plasma, (2) electron temperature in these height ranges is higher than the possible range of neutral temperature. These findings strongly suggest that the heat source that elevates electron temperature much higher than possible neutral temperature exists at around 100 km, and/or that the physical parameter values, which are used in the present theory to calculate electron temperature, are not proper.


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