scholarly journals Transport mechanism in lightly doped hydrogenated microcrystalline silicon thin films

2005 ◽  
Vol 97 (4) ◽  
pp. 043711 ◽  
Author(s):  
A. Dussan ◽  
R. H. Buitrago
Keyword(s):  
Thin Films ◽  
Transport Mechanism ◽  
Microcrystalline Silicon ◽  
Silicon Thin Films

Transport mechanism of microcrystalline silicon thin films

2002 ◽  
Vol 299-302 ◽  
pp. 385-389 ◽  
Author(s):  
F. Liu ◽  
M. Zhu ◽  
Y. Feng ◽  
Y. Han ◽  
J. Liu ◽  
...  
Keyword(s):  
Thin Films ◽  
Transport Mechanism ◽  
Microcrystalline Silicon ◽  
Silicon Thin Films

Electric transport mechanism in intrinsic andp-doped microcrystalline silicon thin films

2003 ◽  
Vol 94 (4) ◽  
pp. 2417-2422 ◽  
Author(s):  
S. B. Concari ◽  
R. H. Buitrago ◽  
M. T. Gutiérrez ◽  
J. J. Gandı́a
Keyword(s):  
Thin Films ◽  
Transport Mechanism ◽  
Electric Transport ◽  
Microcrystalline Silicon ◽  
Silicon Thin Films

Effect of silane/hydrogen ratio on microcrystalline silicon thin films by remote inductively coupled plasma

2013 ◽  
Vol 113 (20) ◽  
pp. 203505 ◽  
Author(s):  
Y. N. Guo ◽  
D. Y. Wei ◽  
S. Q. Xiao ◽  
S. Y. Huang ◽  
H. P. Zhou ◽  
...  
Keyword(s):  
Thin Films ◽  
Inductively Coupled Plasma ◽  
Microcrystalline Silicon ◽  
Inductively Coupled ◽  
Silicon Thin Films

New two-step growth of microcrystalline silicon thin films without incubation layer

2011 ◽  
Vol 322 (1) ◽  
pp. 1-5 ◽  
Author(s):  
Hongyun Yue ◽  
Aimin Wu ◽  
Xueyu Zhang ◽  
Tingju Li
Keyword(s):  
Thin Films ◽  
Microcrystalline Silicon ◽  
Silicon Thin Films ◽  
Step Growth
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