Role of hydrogen diffusion on the growth of polymorphous and microcrystalline silicon thin films

2006 ◽  
Vol 35 (3) ◽  
pp. 165-172 ◽  
Author(s):  
A. Fontcuberta i Morral ◽  
P. Roca i Cabarrocas
Keyword(s):  
Thin Films ◽  
Hydrogen Diffusion ◽  
Microcrystalline Silicon ◽  
Silicon Thin Films

Role of Substrate Temperature on the Properties of Microcrystalline Silicon Thin Films

2001 ◽  
Vol 40 (Part 1, No. 11) ◽  
pp. 6284-6289 ◽  
Author(s):  
Sumita Mukhopadhyay ◽  
Subhas Chandra Saha ◽  
Swati Ray
Keyword(s):  
Thin Films ◽  
Substrate Temperature ◽  
Microcrystalline Silicon ◽  
Silicon Thin Films

Effect of silane/hydrogen ratio on microcrystalline silicon thin films by remote inductively coupled plasma

2013 ◽  
Vol 113 (20) ◽  
pp. 203505 ◽  
Author(s):  
Y. N. Guo ◽  
D. Y. Wei ◽  
S. Q. Xiao ◽  
S. Y. Huang ◽  
H. P. Zhou ◽  
...  
Keyword(s):  
Thin Films ◽  
Inductively Coupled Plasma ◽  
Microcrystalline Silicon ◽  
Inductively Coupled ◽  
Silicon Thin Films

New two-step growth of microcrystalline silicon thin films without incubation layer

2011 ◽  
Vol 322 (1) ◽  
pp. 1-5 ◽  
Author(s):  
Hongyun Yue ◽  
Aimin Wu ◽  
Xueyu Zhang ◽  
Tingju Li
Keyword(s):  
Thin Films ◽  
Microcrystalline Silicon ◽  
Silicon Thin Films ◽  
Step Growth
Sign in / Sign up

Export Citation Format

Share Document