Charge transfer adsorption in silicon vapor‐phase epitaxial growth

1988 ◽  
Vol 63 (2) ◽  
pp. 390-394 ◽  
Author(s):  
A. Ishitani ◽  
T. Takada ◽  
Y. Ohshita
Keyword(s):  
Charge Transfer ◽  
Epitaxial Growth ◽  
Vapor Phase ◽  
Silicon Vapor

Charge Transfer and Surface Reaction in Silicon Vapor Phase Epitaxial Growth

1987 ◽  
Vol 94 ◽  
Author(s):  
A. Ishitani ◽  
T. Takada ◽  
Y. Ohshita ◽  
K. Tanigaki
Keyword(s):  
Charge Transfer ◽  
Epitaxial Growth ◽  
Vapor Phase ◽  
Adsorption Mechanism ◽  
Surface Reaction ◽  
Orbital Method ◽  
Bridge Site ◽  
Lower Total Energy ◽  
Silicon Vapor ◽  
Optimized Geometries

ABSTRACTSilicon vapor phase epitaxial growth with SiH2Cl2 is theoretically studied. The optimized geometries and total energigs of the species, generated from SiH2Cl2, are calculated by using ab initio molecular orbital method. As the intgraction between silicon surface and SiCl2 the charge transfer is considered. Based on the computational result that SiCl2 - has the lower total energy than SiCl2, a new adsorption mechanism, named, charge transfer adsorption, is p~oposed. By using this charge transfer adsorption followed by the surface reaction at the hollow bridge site, the epitaxial growths on the silicon (001), (111), and (110) surfaces are discussed.

Silicon vapor phase epitaxial growth catalysis by the presence of germane

1990 ◽  
Vol 56 (13) ◽  
pp. 1275-1277 ◽  
Author(s):  
P. M. Garone ◽  
J. C. Sturm ◽  
P. V. Schwartz ◽  
S. A. Schwarz ◽  
B. J. Wilkens
Keyword(s):  
Epitaxial Growth ◽  
Vapor Phase ◽  
Silicon Vapor

The facet evolution during metalorganic vapor phase epitaxial growth on V-grooved high Miller index GaAs substrates

1994 ◽  
Vol 139 (3-4) ◽  
pp. 231-237 ◽  
Author(s):  
Moo-Sung Kim ◽  
Yong Kim ◽  
Min-Suk Lee ◽  
Young Ju Park ◽  
Seong-Il Kim ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
Vapor Phase ◽  
Miller Index ◽  
Gaas Substrates

Metal-organic vapor-phase epitaxial growth of HgCdTe device heterostructures on three-inch-diameter substrates

2003 ◽  
Vol 32 (7) ◽  
pp. 656-660 ◽  
Author(s):  
C. D. Maxey ◽  
J. P. Camplin ◽  
I. T. Guilfoy ◽  
J. Gardner ◽  
R. A. Lockett ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
Vapor Phase ◽  
Organic Vapor ◽  
Metal Organic

Orientation Effects in GaP Vapor Phase Epitaxial Growth

1969 ◽  
Vol 8 (7) ◽  
pp. 973-974 ◽  
Author(s):  
Yoshitaka Furukawa ◽  
Ganzo Iwane ◽  
Seigo Ando
Keyword(s):  
Epitaxial Growth ◽  
Vapor Phase ◽  
Orientation Effects
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