The origin of defects in SiO2thermally grown on Czochralski silicon substrates

1995 ◽  
Vol 78 (3) ◽  
pp. 1940-1943 ◽  
Author(s):  
Manabu Itsumi ◽  
Masato Tomita ◽  
Masataka Yamawaki
Keyword(s):  
Silicon Substrates ◽  
Czochralski Silicon

Determination of Sub‐Parts per Billion Boron Contamination in N+ Czochralski Silicon Substrates by SIMS

1994 ◽  
Vol 141 (12) ◽  
pp. 3453-3456 ◽  
Author(s):  
Paul K. Chu ◽  
Roger J. Bleiler ◽  
Jenny M. Metz
Keyword(s):  
Silicon Substrates ◽  
Czochralski Silicon

Record Efficiency on Large Area P-Type Czochralski Silicon Substrates

2012 ◽  
Vol 51 (10S) ◽  
pp. 10NA08 ◽  
Author(s):  
Brett Hallam ◽  
Stuart Wenham ◽  
Haeseok Lee ◽  
Eunjoo Lee ◽  
Hyunwoo Lee ◽  
...  
Keyword(s):  
Silicon Substrates ◽  
Large Area ◽  
Czochralski Silicon ◽  
P Type

Electron irradiation induced defects in germanium-doped Czochralski silicon substrates and diodes

2010 ◽  
Vol 8 (3) ◽  
pp. 674-677 ◽  
Author(s):  
Jiahe Chen ◽  
Jan Vanhellemont ◽  
Eddy Simoen ◽  
Johan Lauwaert ◽  
Henk Vrielinck ◽  
...  
Keyword(s):  
Electron Irradiation ◽  
Silicon Substrates ◽  
Czochralski Silicon ◽  
Induced Defects ◽  
Irradiation Induced Defects

Effect of Heavy Boron Doping on Oxygen Precipitation in Czochralski Silicon Substrates of Epitaxial Wafers

2000 ◽  
Vol 147 (2) ◽  
pp. 756 ◽  
Author(s):  
Koji Sueoka ◽  
Masanori Akatsuka ◽  
Mitsuharu Yonemura ◽  
Toshiaki Ono ◽  
Eiichi Asayama ◽  
...  
Keyword(s):  
Boron Doping ◽  
Silicon Substrates ◽  
Czochralski Silicon ◽  
Oxygen Precipitation

Oxide defects originating from Czochralski silicon substrates

1992 ◽  
Vol 72 (6) ◽  
pp. 2185-2191 ◽  
Author(s):  
Manabu Itsumi ◽  
Osaake Nakajima ◽  
Noboru Shiono
Keyword(s):  
Silicon Substrates ◽  
Czochralski Silicon ◽  
Oxide Defects

Record Efficiency on Large Area P-Type Czochralski Silicon Substrates

2012 ◽  
Vol 51 ◽  
pp. 10NA08 ◽  
Author(s):  
Brett Hallam ◽  
Stuart Wenham ◽  
Haeseok Lee ◽  
Eunjoo Lee ◽  
Hyunwoo Lee ◽  
...  
Keyword(s):  
Silicon Substrates ◽  
Large Area ◽  
Czochralski Silicon ◽  
P Type

scholarly journals Erratum: Electron irradiation induced defects in germanium-doped Czochralski silicon substrates and diodes

2011 ◽  
Vol 8 (4) ◽  
pp. 1428-1428
Author(s):  
Jiahe Chen ◽  
Jan Vanhellemont ◽  
Eddy Simoen ◽  
Johan Lauwaert ◽  
Henk Vrielinck ◽  
...  
Keyword(s):  
Electron Irradiation ◽  
Silicon Substrates ◽  
Czochralski Silicon ◽  
Induced Defects ◽  
Irradiation Induced Defects
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