Characterization and Elimination of Defects in Oxide Layers Grown on Czochralski Silicon Substrates

1994 ◽  
Vol 141 (9) ◽  
pp. 2460-2464 ◽  
Author(s):  
Manabu Itsumi
Keyword(s):  
Silicon Substrates ◽  
Oxide Layers ◽  
Czochralski Silicon

The origin of defects in SiO2thermally grown on Czochralski silicon substrates

1995 ◽  
Vol 78 (3) ◽  
pp. 1940-1943 ◽  
Author(s):  
Manabu Itsumi ◽  
Masato Tomita ◽  
Masataka Yamawaki
Keyword(s):  
Silicon Substrates ◽  
Czochralski Silicon

Determination of Sub‐Parts per Billion Boron Contamination in N+ Czochralski Silicon Substrates by SIMS

1994 ◽  
Vol 141 (12) ◽  
pp. 3453-3456 ◽  
Author(s):  
Paul K. Chu ◽  
Roger J. Bleiler ◽  
Jenny M. Metz
Keyword(s):  
Silicon Substrates ◽  
Czochralski Silicon

Record Efficiency on Large Area P-Type Czochralski Silicon Substrates

2012 ◽  
Vol 51 (10S) ◽  
pp. 10NA08 ◽  
Author(s):  
Brett Hallam ◽  
Stuart Wenham ◽  
Haeseok Lee ◽  
Eunjoo Lee ◽  
Hyunwoo Lee ◽  
...  
Keyword(s):  
Silicon Substrates ◽  
Large Area ◽  
Czochralski Silicon ◽  
P Type

Electron irradiation induced defects in germanium-doped Czochralski silicon substrates and diodes

2010 ◽  
Vol 8 (3) ◽  
pp. 674-677 ◽  
Author(s):  
Jiahe Chen ◽  
Jan Vanhellemont ◽  
Eddy Simoen ◽  
Johan Lauwaert ◽  
Henk Vrielinck ◽  
...  
Keyword(s):  
Electron Irradiation ◽  
Silicon Substrates ◽  
Czochralski Silicon ◽  
Induced Defects ◽  
Irradiation Induced Defects

Surface passivation of n-type Czochralski silicon substrates by thermal-SiO2/plasma-enhanced chemical vapor deposition SiN stacks

2010 ◽  
Vol 96 (3) ◽  
pp. 032105 ◽  
Author(s):  
Yevgeniya Larionova ◽  
Verena Mertens ◽  
Nils-Peter Harder ◽  
Rolf Brendel
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Surface Passivation ◽  
Chemical Vapor ◽  
Silicon Substrates ◽  
Czochralski Silicon

Reduced microwave attenuation in coplanar waveguides using deep level impurity compensated Czochralski-silicon substrates

2011 ◽  
Vol 26 (7) ◽  
pp. 072001 ◽  
Author(s):  
A Abuelgasim ◽  
K Mallik ◽  
P Ashburn ◽  
D M Jordan ◽  
P R Wilshaw ◽  
...  
Keyword(s):  
Deep Level ◽  
Silicon Substrates ◽  
Coplanar Waveguides ◽  
Czochralski Silicon ◽  
Microwave Attenuation ◽  
Deep Level Impurity

Effect of Heavy Boron Doping on Oxygen Precipitation in Czochralski Silicon Substrates of Epitaxial Wafers

2000 ◽  
Vol 147 (2) ◽  
pp. 756 ◽  
Author(s):  
Koji Sueoka ◽  
Masanori Akatsuka ◽  
Mitsuharu Yonemura ◽  
Toshiaki Ono ◽  
Eiichi Asayama ◽  
...  
Keyword(s):  
Boron Doping ◽  
Silicon Substrates ◽  
Czochralski Silicon ◽  
Oxygen Precipitation

Decomposition kinetics of silicon oxide layers on silicon substrates during annealing in vacuum

2013 ◽  
Vol 114 (11) ◽  
pp. 114104 ◽  
Author(s):  
Y. Enta ◽  
T. Nagai ◽  
T. Yoshida ◽  
N. Ujiie ◽  
H. Nakazawa
Keyword(s):  
Silicon Oxide ◽  
Decomposition Kinetics ◽  
Silicon Substrates ◽  
Oxide Layers ◽  
Kinetics Of

Oxide defects originating from Czochralski silicon substrates

1992 ◽  
Vol 72 (6) ◽  
pp. 2185-2191 ◽  
Author(s):  
Manabu Itsumi ◽  
Osaake Nakajima ◽  
Noboru Shiono
Keyword(s):  
Silicon Substrates ◽  
Czochralski Silicon ◽  
Oxide Defects

Activation energy of thermal desorption of silicon oxide layers on silicon substrates

2017 ◽  
Vol 656 ◽  
pp. 96-100 ◽  
Author(s):  
Yoshiharu Enta ◽  
Shodai Osanai ◽  
Takahito Ogasawara
Keyword(s):  
Activation Energy ◽  
Thermal Desorption ◽  
Silicon Oxide ◽  
Silicon Substrates ◽  
Oxide Layers
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