Chemical kinetics in low pressure acetylene radio frequency glow discharges

Journal of Applied Physics ◽

10.1063/1.366333 ◽

1997 ◽

Vol 82 (10) ◽

pp. 4763-4771 ◽

Author(s):

James R. Doyle

Keyword(s):

Radio Frequency ◽

Chemical Kinetics ◽

Low Pressure ◽

Glow Discharges

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Power dissipated in low‐pressure radio‐frequency discharge plasmas

Journal of Applied Physics ◽

10.1063/1.335395 ◽

1985 ◽

Vol 57 (1) ◽

pp. 53-58 ◽

Author(s):

O. A. Popov ◽

V. A. Godyak

Keyword(s):

Radio Frequency ◽

Low Pressure ◽

Discharge Plasmas ◽

Radio Frequency Discharge

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Radio-frequency magnetized ring-shaped hollow cathode discharge plasma for low-pressure plasma processing

Vacuum ◽

10.1016/j.vacuum.2013.07.029 ◽

2014 ◽

Vol 101 ◽

pp. 46-52 ◽

Author(s):

Yasunori Ohtsu ◽

Junta Eguchi ◽

Yoshiki Yahata

Keyword(s):

Radio Frequency ◽

Hollow Cathode ◽

Discharge Plasma ◽

Plasma Processing ◽

Low Pressure ◽

Hollow Cathode Discharge ◽

Pressure Plasma ◽

Low Pressure Plasma

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Emission characteristics of mixed gas plasmas in low-pressure glow discharges

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/s0584-8547(01)00184-7 ◽

2001 ◽

Vol 56 (5) ◽

pp. 465-486 ◽

Author(s):

Kazuaki Wagatsuma

Keyword(s):

Low Pressure ◽

Emission Characteristics ◽

Mixed Gas ◽

Glow Discharges

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Continuum modeling of argon radio frequency glow discharges

Applied Physics Letters ◽

10.1063/1.98183 ◽

1987 ◽

Vol 50 (9) ◽

pp. 492-494 ◽

Author(s):

Albert D. Richards ◽

Brian E. Thompson ◽

Herbert H. Sawin

Keyword(s):

Radio Frequency ◽

Continuum Modeling ◽

Glow Discharges

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Experimental investigations of glow discharges in hollow cathode geometries at low pressure

IEEE Transactions on Plasma Science ◽

10.1109/tps.2005.845929 ◽

2005 ◽

Vol 33 (2) ◽

pp. 384-385 ◽

Author(s):

T. Callegari ◽

F. Gegot ◽

L.C. Pitchford ◽

J. Galy ◽

J.P. Boeuf

Keyword(s):

Hollow Cathode ◽

Low Pressure ◽

Experimental Investigations ◽

Glow Discharges

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Study on Effect of Neutral Gas Pressure on Plasma Characteristics in Capacitive RF Argon Glow Discharges at Low Pressure by Fluid Modeling

IEEE Transactions on Plasma Science ◽

10.1109/tps.2018.2818164 ◽

2018 ◽

Vol 46 (5) ◽

pp. 1738-1746 ◽

Author(s):

Tagra Samir ◽

Yue Liu ◽

Lulu Zhao

Keyword(s):

Low Pressure ◽

Gas Pressure ◽

Fluid Modeling ◽

Neutral Gas ◽

Glow Discharges ◽

Plasma Characteristics

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Summary Abstract: Diagnostics of low‐pressure oxygen radio‐frequency plasmas and the mechanism for polymer etching: A comparison of reactive sputter etching and magnetron sputter etching

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.573942 ◽

1986 ◽

Vol 4 (3) ◽

pp. 1798-1799 ◽

Author(s):

Ch. Steinbrüchel ◽

B. J. Curtis ◽

H. W. Lehmann ◽

R. Widmer

Keyword(s):

Radio Frequency ◽

Low Pressure ◽

Pressure Oxygen ◽

Magnetron Sputter ◽

Sputter Etching

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Radio-frequency dielectric-barrier glow discharges in atmospheric argon

Applied Physics Letters ◽

10.1063/1.2713141 ◽

2007 ◽

Vol 90 (11) ◽

pp. 111502 ◽

Author(s):

J. J. Shi ◽

M. G. Kong

Keyword(s):

Radio Frequency ◽

Dielectric Barrier ◽

Glow Discharges ◽

Atmospheric Argon

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Stability of a dust cloud in the radio frequency low-pressure gas discharge

Physics of Plasmas ◽

10.1063/5.0053178 ◽

2021 ◽

Vol 28 (7) ◽

pp. 073701

Author(s):

D. I. Zhukhovitskii

Keyword(s):

Radio Frequency ◽

Low Pressure ◽

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Measurements in silane radio frequency glow discharges using a tuned and heated Langmuir probe

Journal of Applied Physics ◽

10.1063/1.354322 ◽

1993 ◽

Vol 74 (8) ◽

pp. 4899-4902 ◽

Author(s):

Quixun Lin ◽

Xuangying Lin ◽

Yunpeng Yu ◽

Hong Wang ◽

Jiayi Chen

Keyword(s):

Radio Frequency ◽

Langmuir Probe ◽

Glow Discharges

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