Summary Abstract: Diagnostics of low‐pressure oxygen radio‐frequency plasmas and the mechanism for polymer etching: A comparison of reactive sputter etching and magnetron sputter etching

1986 ◽  
Vol 4 (3) ◽  
pp. 1798-1799 ◽  
Author(s):  
Ch. Steinbrüchel ◽  
B. J. Curtis ◽  
H. W. Lehmann ◽  
R. Widmer
Keyword(s):  
Radio Frequency ◽  
Low Pressure ◽  
Pressure Oxygen ◽  
Magnetron Sputter ◽  
Sputter Etching

Growth and characterization of radio frequency magnetron sputter-deposited zinc stannate, Zn2SnO4, thin films

2002 ◽  
Vol 92 (1) ◽  
pp. 310-319 ◽  
Author(s):  
David L. Young ◽  
Helio Moutinho ◽  
Yanfa Yan ◽  
Timothy J. Coutts
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Zinc Stannate ◽  
Magnetron Sputter ◽  
Sputter Deposited

Oxidation behavior of a single phase γ-TiAl alloy in low-pressure oxygen and hydrogen

2005 ◽  
Vol 53 (3) ◽  
pp. 601-608 ◽  
Author(s):  
D. Legzdina ◽  
I.M. Robertson ◽  
H.K. Birnbaum
Keyword(s):  
Oxidation Behavior ◽  
Single Phase ◽  
Tial Alloy ◽  
Low Pressure ◽  
Pressure Oxygen

High temperature tribological behaviors of in-situ formed TiAl-TiB2 composites in low pressure oxygen

2021 ◽  
pp. 1-9
Author(s):  
Long Wang ◽  
Dongsheng Yang ◽  
Jiao Chen ◽  
Hui Tan ◽  
Shengyu Zhu ◽  
...  
Keyword(s):  
High Temperature ◽  
Low Pressure ◽  
Tribological Behaviors ◽  
Pressure Oxygen
Sign in / Sign up

Export Citation Format

Share Document