Ultrahigh frequency versus inductively coupled chlorine plasmas: Comparisons of Cl and Cl2 concentrations and electron temperatures measured by trace rare gases optical emission spectroscopy
2016 ◽
2018 ◽
2021 ◽
Vol 1764
(1)
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pp. 012030
2004 ◽
Vol 37
(19)
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pp. R217-R236
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2008 ◽
Vol 2
(4)
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pp. 254-261
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2011 ◽
Vol 44
(28)
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pp. 285203
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