Spatially resolved electron temperatures, species concentrations, and electron energy distributions in inductively coupled chlorine plasmas, measured by trace-rare gases optical emission spectroscopy

2002 ◽  
Vol 91 (10) ◽  
pp. 6288 ◽  
Author(s):  
V. M. Donnelly ◽  
M. J. Schabel
Keyword(s):  
Electron Energy ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Rare Gases ◽  
Energy Distributions ◽  
Inductively Coupled ◽  
Spatially Resolved

Assessment of Electron Energy Distributions in Discharges by Optical Emission Spectroscopy

2007 ◽  
Author(s):  
Dirk Dodt ◽  
Andreas Dinklage ◽  
Rainer Fischer ◽  
Roland Preuss ◽  
Kevin H. Knuth ◽  
...  
Keyword(s):  
Electron Energy ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Energy Distributions

Inductively Coupled RF Oxygen Plasma Studied by Spatially Resolved Optical Emission Spectroscopy

2008 ◽  
Vol 36 (4) ◽  
pp. 1368-1369 ◽  
Author(s):  
Z. Kregar ◽  
N. Krstulovic ◽  
S. Milosevic ◽  
K. Kenda ◽  
U. Cvelbar ◽  
...  
Keyword(s):  
Emission Spectroscopy ◽  
Oxygen Plasma ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Inductively Coupled ◽  
Spatially Resolved
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