Plasma electron temperatures and electron energy distributions measured by trace rare gases optical emission spectroscopy

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/37/19/r01 ◽

2004 ◽

Vol 37 (19) ◽

pp. R217-R236 ◽

Author(s):

V M Donnelly

Keyword(s):

Electron Energy ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Plasma Electron ◽

Energy Distributions

Download Full-text

Spatially resolved electron temperatures, species concentrations, and electron energy distributions in inductively coupled chlorine plasmas, measured by trace-rare gases optical emission spectroscopy

Journal of Applied Physics ◽

10.1063/1.1467398 ◽

2002 ◽

Vol 91 (10) ◽

pp. 6288 ◽

Author(s):

V. M. Donnelly ◽

M. J. Schabel

Keyword(s):

Electron Energy ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Energy Distributions ◽

Inductively Coupled ◽

Spatially Resolved

Download Full-text

Assessment of Electron Energy Distributions in Discharges by Optical Emission Spectroscopy

10.1063/1.2821299 ◽

2007 ◽

Author(s):

Dirk Dodt ◽

Andreas Dinklage ◽

Rainer Fischer ◽

Roland Preuss ◽

Kevin H. Knuth ◽

...

Keyword(s):

Electron Energy ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Energy Distributions

Download Full-text

Determination of Non-Maxwellian Electron Energy Distributions in Low-Pressure Plasmas by Using the Optical Emission Spectroscopy and a Collisional-Radiative Model

Plasma Science and Technology ◽

10.1088/1009-0630/13/3/02 ◽

2011 ◽

Vol 13 (3) ◽

pp. 267-278 ◽

Author(s):

Ximing Zhu ◽

Yikang Pu

Keyword(s):

Electron Energy ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Low Pressure ◽

Energy Distributions ◽

Collisional Radiative Model ◽

Radiative Model

Download Full-text

Measurement of electron temperatures and electron energy distribution functions in dual frequency capacitively coupled CF4/O2 plasmas using trace rare gases optical emission spectroscopy

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3179162 ◽

2009 ◽

Vol 27 (5) ◽

pp. 1159-1165 ◽

Author(s):

Zhiying Chen ◽

Vincent M. Donnelly ◽

Demetre J. Economou ◽

Lee Chen ◽

Merritt Funk ◽

...

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Distribution Functions ◽

Dual Frequency ◽

Capacitively Coupled ◽

Energy Distribution Functions

Download Full-text

Langmuir probe diagnostics of electron energy distributions with optical emission spectroscopy in capacitively coupled rf discharge in nitrogen

Journal of Applied Physics ◽

10.1063/1.3664858 ◽

2011 ◽

Vol 110 (11) ◽

pp. 113303 ◽

Author(s):

E. Abdel-Fattah ◽

M. Bazavan ◽

H. Sugai

Keyword(s):

Electron Energy ◽

Langmuir Probe ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Rf Discharge ◽

Energy Distributions ◽

Capacitively Coupled ◽

Probe Diagnostics

Download Full-text

Probing suprathermal electrons by trace rare gases optical emission spectroscopy in low pressure dipolar microwave plasmas excited at the electron cyclotron resonance

Physics of Plasmas ◽

10.1063/1.5045348 ◽

2018 ◽

Vol 25 (9) ◽

pp. 093511 ◽

Author(s):

S. Boivin ◽

X. Glad ◽

L. Latrasse ◽

A. Sarkissian ◽

L. Stafford

Keyword(s):

Cyclotron Resonance ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Electron Cyclotron Resonance ◽

Optical Emission ◽

Low Pressure ◽

Electron Cyclotron ◽

Microwave Plasmas ◽

Suprathermal Electrons

Download Full-text

Form-Free Reconstruction of an Electron Energy Distribution Function from Optical Emission Spectroscopy

10.1063/1.2909110 ◽

2008 ◽

Author(s):

D. Dodt ◽

A. Dinklage ◽

R. Fischer ◽

K. Bartschat ◽

O. Zatsarinny ◽

...

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Energy Distribution Function ◽

Electron Energy Distribution

Download Full-text

Trace rare gases optical emission spectroscopy: Nonintrusive method for measuring electron temperatures in low-pressure, low-temperature plasmas

Physical Review E ◽

10.1103/physreve.60.6016 ◽

1999 ◽

Vol 60 (5) ◽

pp. 6016-6029 ◽

Author(s):

M. V. Malyshev ◽

V. M. Donnelly

Keyword(s):

Low Temperature ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Low Pressure ◽

Low Temperature Plasmas

Download Full-text

Ultrahigh frequency versus inductively coupled chlorine plasmas: Comparisons of Cl and Cl2 concentrations and electron temperatures measured by trace rare gases optical emission spectroscopy

Journal of Applied Physics ◽

10.1063/1.368820 ◽

1998 ◽

Vol 84 (3) ◽

pp. 1222-1230 ◽

Author(s):

M. V. Malyshev ◽

V. M. Donnelly ◽

S. Samukawa

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Ultrahigh Frequency ◽

Inductively Coupled

Download Full-text

Optical emission spectroscopy for simultaneous measurement of plasma electron density and temperature in a low-pressure microwave induced plasma

Physics of Plasmas ◽

10.1063/1.3240325 ◽

2009 ◽

Vol 16 (10) ◽

pp. 103501 ◽

Author(s):

N. Konjević ◽

S. Jovićević ◽

M. Ivković

Keyword(s):

Electron Density ◽

Simultaneous Measurement ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Low Pressure ◽

Plasma Electron ◽

Microwave Induced Plasma ◽

Electron Density And Temperature ◽

Plasma Electron Density

Download Full-text