Electromigration-induced drift in damascene and plasma-etched Al(Cu). II. Mass transport mechanisms in bamboo interconnects
2005 ◽
Vol 22
(7)
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pp. 1129-1141
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1985 ◽
Vol 19
(5)
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pp. 665-668
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2003 ◽
Vol 37
(2)
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pp. 292-299
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Keyword(s):
2006 ◽
Vol 63
(3)
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pp. 262-269
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Keyword(s):
1989 ◽
Vol 72
(8)
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pp. 1550-1555
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Keyword(s):