Impurity-limited lattice disorder recovery in ion-implanted ZnO

Applied Physics Letters ◽

10.1063/1.4768289 ◽

2012 ◽

Vol 101 (22) ◽

pp. 222109 ◽

Author(s):

A. Yu. Azarov ◽

B. G. Svensson ◽

A. Yu. Kuznetsov

Keyword(s):

Lattice Disorder ◽

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ELECTRON MICROSCOPE OBSERVATION OF LATTICE DISORDER IN ION‐IMPLANTED SILICON

Applied Physics Letters ◽

10.1063/1.1653654 ◽

1971 ◽

Vol 18 (6) ◽

pp. 257-259 ◽

Author(s):

M. Bertolotti ◽

D. Sette ◽

L. Stagni ◽

G. Vitali

Keyword(s):

Electron Microscope ◽

Microscope Observation ◽

Electron Microscope Observation ◽

Lattice Disorder ◽

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Lattice Disorder and Outdiffusion in Ion Implanted InSb and CdTe

Ion Implantation in Semiconductors ◽

10.1007/978-3-642-80660-5_31 ◽

1971 ◽

pp. 228-234 ◽

Author(s):

G. Langguth ◽

E. Lang ◽

O. Meyer

Keyword(s):

Lattice Disorder ◽

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Manganese-induced long-range lattice disorder and vacancy formation in metal-organic chemical vapor deposition grown and ion-implanted Ga1−xMnxN

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.2201052 ◽

2006 ◽

Vol 24 (4) ◽

pp. 1640-1643 ◽

Author(s):

William E. Fenwick ◽

Ali Asghar ◽

Shalini Gupta ◽

Hun Kang ◽

Martin Strassburg ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Vacancy Formation ◽

Organic Chemical ◽

Lattice Disorder ◽

Metal Organic ◽

Organic Chemical Vapor Deposition ◽

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Influence of oxygen and lattice disorder on the Kondo resistivity of ion implanted InMn alloys

Solid State Communications ◽

10.1016/0038-1098(79)91110-4 ◽

1979 ◽

Vol 29 (2) ◽

pp. 93-98 ◽

Author(s):

M. Hitzfeld ◽

G. Heim

Keyword(s):

Lattice Disorder ◽

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Si2+ ion implanted into stoichiometric lithium niobate crystals: Waveguide characterization and lattice disorder analysis

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2006.06.012 ◽

2006 ◽

Vol 251 (1) ◽

pp. 104-108 ◽

Author(s):

Lei Wang ◽

Feng Chen ◽

Xue-Lin Wang ◽

Liang-Ling Wang ◽

Ke-Ming Wang ◽

...

Keyword(s):

Lithium Niobate ◽

Lattice Disorder ◽

Lithium Niobate Crystals ◽

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The Energy Dependence of Lattice Disorder in Ion-Implanted Silicon

physica status solidi (b) ◽

10.1002/pssb.19690350126 ◽

1969 ◽

Vol 35 (1) ◽

pp. 269-275 ◽

Author(s):

D. A. Marsden ◽

G. R. Bellavance ◽

J. A. Davies ◽

M. Martini ◽

P. Sigmund

Keyword(s):

Energy Dependence ◽

Lattice Disorder ◽

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Lattice disorder and N elemental segregation in ion implanted GaN epilayer

Applied Surface Science ◽

10.1016/j.apsusc.2019.143911 ◽

2020 ◽

Vol 499 ◽

pp. 143911 ◽

Author(s):

B.S. Li ◽

H.P. Liu ◽

L.J. Xu ◽

J. Wang ◽

J. Song ◽

...

Keyword(s):

Lattice Disorder ◽

Elemental Segregation ◽

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The energy dependence and depth distribution of lattice disorder in ion-implanted silicon

Radiation Effects ◽

10.1080/00337577008236295 ◽

1970 ◽

Vol 6 (2) ◽

pp. 181-185 ◽

Author(s):

D. A. Marsden ◽

J. L. Whitton

Keyword(s):

Energy Dependence ◽

Depth Distribution ◽

Lattice Disorder ◽

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Dose dependence of residual lattice disorder in ion‐implanted and annealed silicon

Applied Physics Letters ◽

10.1063/1.89408 ◽

1977 ◽

Vol 30 (7) ◽

pp. 322-323 ◽

Author(s):

C. E. Christodoulides ◽

W. A. Grant ◽

J. S. Williams

Keyword(s):

Dose Dependence ◽

Lattice Disorder ◽

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Lattice Disorder in Ion‐Implanted Boron‐Doped Silicon

Applied Physics Letters ◽

10.1063/1.1653724 ◽

1971 ◽

Vol 19 (1) ◽

pp. 14-16 ◽

Author(s):

J. K. Hirvonen ◽

F. H. Eisen

Keyword(s):

Lattice Disorder ◽

Boron Doped ◽

Doped Silicon ◽

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