Optical emission spectroscopy and Langmuir probe diagnostics of CH3F/O2 inductively coupled plasmas

Optical Emission ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Probe Diagnostics ◽

Coupled Plasmas

Utilization of Optical Emission Spectroscopy for End-Point Detection during AlGaAs/GaAs and InGaP/GaAs Etching in BCl[sub 3]/N[sub 2] Inductively Coupled Plasmas

Journal of The Electrochemical Society ◽

10.1149/1.1386386 ◽

2001 ◽

Vol 148 (9) ◽

pp. G472

Author(s):

J. W. Lee ◽

M. H. Jeon ◽

G. S. Cho ◽

H. C. Yim ◽

S. K. Chang ◽

...

Keyword(s):

Emission Spectroscopy ◽

Optical Emission ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

End Point ◽

End Point Detection ◽

Coupled Plasmas ◽

Point Detection

Spatially resolved optical emission spectroscopy investigation of E and H modes in cylindrical inductively coupled plasmas

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/40/17/017 ◽

2007 ◽

Vol 40 (17) ◽

pp. 5112-5116 ◽

Cited By ~ 6

Author(s):

Yu Chen ◽

Zhi-Gang Guo ◽

Xi-Ming Zhu ◽

Zhi-Guo Mao ◽

Yi-Kang Pu

Keyword(s):

Emission Spectroscopy ◽

Optical Emission ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Spatially Resolved ◽

Coupled Plasmas

Observation of the transition of operating regions in a low-pressure inductively coupled oxygen plasma by Langmuir probe measurement and optical emission spectroscopy

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/34/18/320 ◽

2001 ◽

Vol 34 (18) ◽

pp. 2854-2861 ◽

Cited By ~ 23

Author(s):

Dong-cheol Seo ◽

Tae-hun Chung

Keyword(s):

Langmuir Probe ◽

Emission Spectroscopy ◽

Oxygen Plasma ◽

Optical Emission ◽

Low Pressure ◽

Probe Measurement ◽

Inductively Coupled ◽

Operating Regions

Characterization of an inductively coupled nitrogen-argon plasma by Langmuir probe combined with optical emission spectroscopy

Physics of Plasmas ◽

10.1063/1.3554706 ◽

2011 ◽

Vol 18 (2) ◽

pp. 023504 ◽

Cited By ~ 32

Author(s):

M. A. Song ◽

Y. W. Lee ◽

T. H. Chung

Keyword(s):

Langmuir Probe ◽

Emission Spectroscopy ◽

Argon Plasma ◽

Optical Emission ◽

Inductively Coupled

Langmuir probe diagnostics of electron energy distributions with optical emission spectroscopy in capacitively coupled rf discharge in nitrogen

Journal of Applied Physics ◽

10.1063/1.3664858 ◽

2011 ◽

Vol 110 (11) ◽

pp. 113303 ◽

Cited By ~ 20

Author(s):

E. Abdel-Fattah ◽

M. Bazavan ◽

H. Sugai

Keyword(s):

Electron Energy ◽

Langmuir Probe ◽

Emission Spectroscopy ◽

Optical Emission ◽

Rf Discharge ◽

Energy Distributions ◽

Capacitively Coupled ◽

Probe Diagnostics

Low-Pressure Inductively Coupled CF3Br Plasma Studied by the Langmuir Probe and Optical Emission Spectroscopy Techniques

Technical Physics Letters ◽

10.1134/s1063785021010247 ◽

2021 ◽

Vol 47 (1) ◽

pp. 99-102

Author(s):

V. O. Kuzmenko ◽

A. V. Miakonkikh

Keyword(s):

Langmuir Probe ◽

Emission Spectroscopy ◽

Optical Emission ◽

Low Pressure ◽

Inductively Coupled

Animal and vegetable fats and oils. Determination of trace elements by inductively coupled plasma optical emission spectroscopy (ICP-OES)

10.3403/30303050u ◽

2016 ◽

Keyword(s):

Trace Elements ◽

Emission Spectroscopy ◽

Optical Emission ◽

Fats And Oils ◽

Icp Oes ◽

Inductively Coupled ◽

EXAMINING CONDUCTIVITY AND SUBSURFACE HEAVY METAL CONCENTRATIONS WITHIN WESTERN PENNSYLVANIA THROUGH THE USE OF INDUCTIVELY COUPLED PLASMA OPTICAL EMISSION SPECTROSCOPY

10.1130/abs/2018ne-310850 ◽

2018 ◽

Author(s):

Nicholas Santoro ◽

◽

Gregory J. Mount

Keyword(s):

Heavy Metal ◽

Emission Spectroscopy ◽

Optical Emission ◽

Metal Concentrations ◽

Heavy Metal Concentrations ◽

Inductively Coupled ◽

Western Pennsylvania ◽

Inductively coupled plasma optical emission spectroscopy as a tool for evaluating lateral flow assays

Analytical Methods ◽

10.1039/d1ay00236h ◽

2021 ◽

Author(s):

Jenna M. DeSousa ◽

Micaella Z. Jorge ◽

Hayley B. Lindsay ◽

Frederick R. Haselton ◽

David W. Wright ◽

...

Keyword(s):

Emission Spectroscopy ◽

Optical Emission ◽

Lateral Flow ◽

Gold Content ◽

Icp Oes ◽

Inductively Coupled ◽

Lateral Flow Assays ◽

This work demonstrates the first use of ICP-OES to quantitatively analyze gold content on lateral flow assays.

Method validation of As, Cd, Cr, Cu, Mn, Ni, Se, and Zn metals in Citarum River sediment using Inductively Coupled Plasma – Optical Emission Spectroscopy (ICP-OES)

Journal of Physics Conference Series ◽

10.1088/1742-6596/1764/1/012030 ◽

2021 ◽

Vol 1764 (1) ◽

pp. 012030

Author(s):

T A Koesmawati ◽

S Tanuwidjaja ◽

A Nurachman

Keyword(s):

Method Validation ◽

Emission Spectroscopy ◽

River Sediment ◽

Optical Emission ◽

Icp Oes ◽

Inductively Coupled ◽