Utilization of Optical Emission Spectroscopy for End-Point Detection during AlGaAs/GaAs and InGaP/GaAs Etching in BCl[sub 3]/N[sub 2] Inductively Coupled Plasmas
1980 ◽
Vol 127
(1)
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pp. 234-235
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2000 ◽
Vol 54
(3-4)
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pp. 303-314
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2001 ◽
Vol 82
(1-3)
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pp. 159-162
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1985 ◽
Vol 40
(7)
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pp. i
1984 ◽
Vol 2
(2)
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pp. 481-484
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Keyword(s):
2013 ◽
Vol 14
(5)
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pp. 254-257
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2007 ◽
Vol 40
(17)
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pp. 5112-5116
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