Langmuir probe diagnostics of electron energy distributions with optical emission spectroscopy in capacitively coupled rf discharge in nitrogen

2011 ◽  
Vol 110 (11) ◽  
pp. 113303 ◽  
Author(s):  
E. Abdel-Fattah ◽  
M. Bazavan ◽  
H. Sugai
Keyword(s):  
Electron Energy ◽  
Langmuir Probe ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Rf Discharge ◽  
Energy Distributions ◽  
Capacitively Coupled ◽  
Probe Diagnostics

Assessment of Electron Energy Distributions in Discharges by Optical Emission Spectroscopy

2007 ◽  
Author(s):  
Dirk Dodt ◽  
Andreas Dinklage ◽  
Rainer Fischer ◽  
Roland Preuss ◽  
Kevin H. Knuth ◽  
...  
Keyword(s):  
Electron Energy ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Energy Distributions

scholarly journals Diagnostics of parameters by optical emission spectroscopy and Langmuir probe in a discharge of Ar/N2/CH4ternary mixture

2012 ◽  
Vol 370 ◽  
pp. 012047
Author(s):  
A Guerrero ◽  
L Salazar-Flores ◽  
C Torres-Segundo ◽  
H Martínez ◽  
P G Reyes ◽  
...  
Keyword(s):  
Langmuir Probe ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission
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