Fabrication method for self-aligned bottom-gate oxide thin-film transistors by utilizing backside excimer-laser irradiation through substrate

2013 ◽  
Vol 103 (14) ◽  
pp. 142111 ◽  
Author(s):  
Mitsuru Nakata ◽  
Hiroshi Tsuji ◽  
Yoshihide Fujisaki ◽  
Hiroto Sato ◽  
Yoshiki Nakajima ◽  
...  
Keyword(s):  
Thin Film ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Thin Film Transistors ◽  
Gate Oxide ◽  
Oxide Thin Film ◽  
Fabrication Method ◽  
Excimer Laser Irradiation ◽  
Bottom Gate

High-Performance Poly-Si Thin Film Transistors Crystallized by Excimer Laser Irradiation with A-Si Spacer Structure

2005 ◽  
Vol 8 (1) ◽  
pp. G14 ◽  
Author(s):  
Ting-Kuo Chang ◽  
Ching-Wei Lin ◽  
Chun-Chien Tsai ◽  
Jian-Hao Lu ◽  
Bo-Ting Chen ◽  
...  
Keyword(s):  
Thin Film ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Thin Film Transistors ◽  
High Performance ◽  
Excimer Laser Irradiation ◽  
Si Thin Film

Electrical and Structural Characterization of Self-Aligned InGaZnO Thin-film Transistors Fabricated by Excimer Laser Irradiation

2017 ◽  
Vol 53 (6) ◽  
pp. 5972-5977 ◽  
Author(s):  
Mitsuru Nakata ◽  
Hiroshi Tsuji ◽  
Yoshihide Fujisaki ◽  
Yoshiki Nakajima ◽  
Tatsuya Takei ◽  
...  
Keyword(s):  
Thin Film ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Structural Characterization ◽  
Thin Film Transistors ◽  
Excimer Laser Irradiation
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