Lateral Diffusion of Phosphorous Induced by Excimer Laser Irradiation of Silicon Thin Film for Formation of Gradual Lightly Doped Region in Polycrystalline Silicon Thin Film Transistors

2007 ◽  
Vol 46 (10A) ◽  
pp. 6525-6529 ◽  
Author(s):  
Sang-Myeon Han ◽  
Sang-Geun Park ◽  
Seung-Yeon Seong ◽  
Chi-Jung Kang ◽  
Min-Koo Han
Keyword(s):  
Thin Film ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
Lateral Diffusion ◽  
Silicon Thin Film ◽  
Excimer Laser Irradiation

High-Performance Low Temperature Poly-Silicon Thin Film Transistors Fabricated by Excimer Laser Irradiation with Bottom-Gate Scheme

2019 ◽  
Vol 3 (8) ◽  
pp. 143-148
Author(s):  
Chun-Chien Tsai ◽  
Hsiu-Hsin Chen ◽  
Yao-Jen Lee ◽  
Hsiu-Hsin Chen ◽  
Huang-Chung Cheng
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Thin Film Transistors ◽  
High Performance ◽  
Silicon Thin Film ◽  
Poly Silicon ◽  
Excimer Laser Irradiation ◽  
Bottom Gate

Threshold voltage of excimer-laser-annealed polycrystalline silicon thin-film transistors

2000 ◽  
Vol 76 (17) ◽  
pp. 2442-2444 ◽  
Author(s):  
C. T. Angelis ◽  
C. A. Dimitriadis ◽  
F. V. Farmakis ◽  
J. Brini ◽  
G. Kamarinos ◽  
...  
Keyword(s):  
Thin Film ◽  
Excimer Laser ◽  
Threshold Voltage ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
Silicon Thin Film

Transconductance of large grain excimer laser-annealed polycrystalline silicon thin film transistors

2000 ◽  
Vol 44 (6) ◽  
pp. 1081-1087 ◽  
Author(s):  
C.T. Angelis ◽  
C.A. Dimitriadis ◽  
F.V. Farmakis ◽  
J. Brini ◽  
G. Kamarinos ◽  
...  
Keyword(s):  
Thin Film ◽  
Excimer Laser ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
Silicon Thin Film

High-Performance Excimer-Laser-Crystallized Polycrystalline Silicon Thin-Film Transistors with the Pre-Patterned Recessed Channel

2012 ◽  
Vol 51 ◽  
pp. 066502
Author(s):  
Chao-Lung Wang ◽  
Huang-Chung Cheng ◽  
I-Che Lee ◽  
Chun-Yu Wu ◽  
Yu-Ting Cheng ◽  
...  
Keyword(s):  
Thin Film ◽  
Excimer Laser ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
High Performance ◽  
Silicon Thin Film ◽  
Recessed Channel
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