Experimental investigations of electron density and ion energy distributions in dual-frequency capacitively coupled plasmas for Ar/CF4 and Ar/O2/CF4 discharges
Keyword(s):
2013 ◽
Vol 46
(23)
◽
pp. 235202
◽
Keyword(s):
Keyword(s):
Keyword(s):
2014 ◽
Vol 32
(2)
◽
pp. 021306
◽
Keyword(s):
2015 ◽
Vol 33
(3)
◽
pp. 031302
◽