Effects of phosphorus doping by plasma immersion ion implantation on the structural and optical characteristics of Zn0.85Mg0.15O thin films

2014 ◽  
Vol 105 (6) ◽  
pp. 061109 ◽  
Author(s):  
S. Saha ◽  
S. Nagar ◽  
S. Chakrabarti
Keyword(s):  
Thin Films ◽  
Ion Implantation ◽  
Optical Characteristics ◽  
Phosphorus Doping ◽  
Plasma Immersion Ion Implantation

The effect of plasma immersion ion implantation on the contact pressure and composition of titanium nitride thin films

2006 ◽  
Vol 201 (1-2) ◽  
pp. 396-400 ◽  
Author(s):  
S.H.N. Lim ◽  
D.G. McCulloch ◽  
M.M.M. Bilek ◽  
D.R. McKenzie ◽  
J. du Plessis ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Implantation ◽  
Titanium Nitride ◽  
Contact Pressure ◽  
Plasma Immersion Ion Implantation

Fabrication of silicon carbide thin films by plasma immersion ion implantation with self-ignited glow discharge

2004 ◽  
Vol 447-448 ◽  
pp. 153-157 ◽  
Author(s):  
Zhenghua An ◽  
Ricky K.Y. Fu ◽  
Peng Chen ◽  
Weili Liu ◽  
Paul K. Chu ◽  
...  
Keyword(s):  
Thin Films ◽  
Silicon Carbide ◽  
Glow Discharge ◽  
Ion Implantation ◽  
Plasma Immersion Ion Implantation

Boron and phosphorus doping of a-SiC:H thin films by means of ion implantation

1995 ◽  
Vol 265 (1-2) ◽  
pp. 113-118 ◽  
Author(s):  
F. Demichelis ◽  
G. Crovini ◽  
C.F. Pirri ◽  
E. Tresso ◽  
R. Galloni ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Implantation ◽  
Phosphorus Doping

p-Type Conversion of ZnO Thin Films by Plasma Immersion Ion Implantation

2009 ◽  
Vol 12 (9) ◽  
pp. H329 ◽  
Author(s):  
Shuyu Zhang ◽  
Rongqing Liang ◽  
Qiongrong Ou ◽  
Xiaojing Wu ◽  
Meifu Jiang ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Implantation ◽  
Zno Thin Films ◽  
Type Conversion ◽  
Plasma Immersion Ion Implantation ◽  
P Type

Silicon carbide and boron carbide thin films formed by plasma immersion ion implantation of hydrocarbon gases

2007 ◽  
Vol 201 (19-20) ◽  
pp. 8366-8369 ◽  
Author(s):  
W. Ensinger ◽  
G. Kraft ◽  
F. Sittner ◽  
K. Volz ◽  
K. Baba ◽  
...  
Keyword(s):  
Thin Films ◽  
Silicon Carbide ◽  
Ion Implantation ◽  
Boron Carbide ◽  
Hydrocarbon Gases ◽  
Plasma Immersion Ion Implantation
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