Lithium-doped zinc oxide(ZLO) thin films were deposited on glass substrates by sol-gel method.And then by controlling processing parameters such as the amount of doped lithium and stability, etc,Well-aligned ZLO nanorod arrays were successfully grown on substrates by hydrothermal method, where the substrates were spin-coated with seed layer.The experiments show the 5% Li-doped and diameter of about 50nm of ZLO thin films nanorod arrays has the best performance photoluminescence and surfactants can promote the growth of ZLO rod-like nano-structures and contribute to the formation of ZLO nanorod arrays with highly oriented.