Extension of view factor model to free molecular flow with non-Maxwellian inflow condition

Author(s):  
Samuel J. Araki
2016 ◽  
Vol 47 (4) ◽  
pp. 367-388 ◽  
Author(s):  
Alexander Ivanovich Erofeev ◽  
Alexander Petrovich Nikiforov ◽  
Sergei Borisovich Nesterov ◽  
Ramul'ya Amirovna Nezhmetdinova

Shinku ◽  
1990 ◽  
Vol 33 (3) ◽  
pp. 98-100
Author(s):  
N. LIU ◽  
S. J. PANG

Sensors ◽  
2021 ◽  
Vol 21 (7) ◽  
pp. 2566
Author(s):  
Boris A. Boom ◽  
Alessandro Bertolini ◽  
Eric Hennes ◽  
Johannes F. J. van den Brand

We present a novel analysis of gas damping in capacitive MEMS transducers that is based on a simple analytical model, assisted by Monte-Carlo simulations performed in Molflow+ to obtain an estimate for the geometry dependent gas diffusion time. This combination provides results with minimal computational expense and through freely available software, as well as insight into how the gas damping depends on the transducer geometry in the molecular flow regime. The results can be used to predict damping for arbitrary gas mixtures. The analysis was verified by experimental results for both air and helium atmospheres and matches these data to within 15% over a wide range of pressures.


1964 ◽  
Vol 7 (8) ◽  
pp. 1262 ◽  
Author(s):  
Marian H. Rose

AIAA Journal ◽  
1975 ◽  
Vol 13 (11) ◽  
pp. 1454-1459 ◽  
Author(s):  
J. Pike

2016 ◽  
Vol 97 ◽  
pp. 22-33 ◽  
Author(s):  
C. Loesche ◽  
G. Wurm ◽  
T. Jankowski ◽  
M. Kuepper

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