scholarly journals Gas Damping in Capacitive MEMS Transducers in the Free Molecular Flow Regime

Sensors ◽  
2021 ◽  
Vol 21 (7) ◽  
pp. 2566
Author(s):  
Boris A. Boom ◽  
Alessandro Bertolini ◽  
Eric Hennes ◽  
Johannes F. J. van den Brand

We present a novel analysis of gas damping in capacitive MEMS transducers that is based on a simple analytical model, assisted by Monte-Carlo simulations performed in Molflow+ to obtain an estimate for the geometry dependent gas diffusion time. This combination provides results with minimal computational expense and through freely available software, as well as insight into how the gas damping depends on the transducer geometry in the molecular flow regime. The results can be used to predict damping for arbitrary gas mixtures. The analysis was verified by experimental results for both air and helium atmospheres and matches these data to within 15% over a wide range of pressures.

1977 ◽  
Vol 55 (4) ◽  
pp. 370-377 ◽  
Author(s):  
A. A. Haasz

Theoretical predictions were obtained for the effect of reflected nitrogen molecules on rotational temperature measurements with rocketborne electron beam fluorescence probes in the free molecular flow regime. Calculations for a typical payload (Black Brant AEF-II-118 flown from Fort Churchill, Man., Canada) indicate that the effect of reflected molecules can be significant and should be considered in the derivation of the theoretical temperature calibration curves.


SPE Journal ◽  
2012 ◽  
Vol 18 (01) ◽  
pp. 38-49 ◽  
Author(s):  
Mohammad R. Rahmanian ◽  
Roberto Aguilera ◽  
Apostolos Kantzas

Summary In this study, single-phase gas-flow simulation that considers slippage effects through a network of slots and microfractures is presented. The statistical parameters for network construction were extracted from petrographic work in tight porous media of the Nikanassin Group in the Western Canada Sedimentary Basin (WCSB). Furthermore, correlations between Klinkenberg slippage effect and absolute permeability have been developed as well as a new unified flow model in which Knudsen number acts implicitly as a flow-regime indicator. A detailed understanding of fluid flow at microscale levels in tight porous media is essential to establish and develop techniques for economic flow rate and recovery. Choosing an appropriate equation for flow through a single element of the network is crucial; this equation must include geometry and other structural features that affect the flow as well as all variation of fluid properties with pressure. Disregarding these details in a single element of porous media can easily lead to flow misinterpretation at the macroscopic scale. Because of the wide flow-path-size distribution in tight porous media, a variety of flow regimes can exist in the equivalent network. Two distinct flow regimes, viscous flow and free molecular flow, are in either side of this flow-regime spectrum. Because the nature of these two types of flow is categorically different, finding/adjusting a unified flow model is problematic. The complication stems from the fact that the viscosity concept misses its meaning as the flow regime changes from viscous to free molecular flow in which a diffusion-like mechanism dominates. For each specified flow regime, the appropriate equations for different geometries are studied. In addition, different unified flow models available in the literature are critically investigated. Simulation of gas flow through the constructed network at different mean flow pressures leads to investigating the functionality of the Klinkenberg factor with permeability of the porous media and pore-level structure.


2018 ◽  
Vol 53 (6) ◽  
Author(s):  
B. V. Kosoy ◽  
Y. Utaka

In the present research we investigate pressure driven flow in the transition and free-molecular flow regimes with the objective of developing unified flow models for microchannels. These models are based on a velocity scaling law, which is valid for a wide range of Knudsen number. Simple slip-based descriptions of flowrate in microchannels are corrected for effects in the transition and free-molecular flow regimes with the introduction of a rarefaction factor. The resulting models can predict the velocity distribution, mass flowrate, pressure and shear stress distribution in rectangular microchannels in the entire Knudsen flow regime.


2009 ◽  
Vol 156 (1) ◽  
pp. 171-179 ◽  
Author(s):  
M.A.G. Suijlen ◽  
J.J. Koning ◽  
M.A.J. van Gils ◽  
H.C.W. Beijerinck

Author(s):  
Jae Hyun Park ◽  
Ali Beskok

Fluid film damping in laterally oscillating microstructures is investigated in the entire Knudsen regime and a wide range of Stokes numbers by using the unsteady DSMC method. DSMC results are validated through comparisons with theoretical predictions at continuum and free molecular flow regimes. Dynamic response of the flow, including the velocity profile, normalized velocity amplitude distribution, and phase angle are presented at various flow conditions. Based on the DSMC data, quality (Q) factors are computed to quantify the damping characteristics of the system. The quality factor increases with rarefaction, proportional to the Knudsen number. The Q-factors from DSMC are compared with predictions of slip-based continuum models. Although the DSMC-based Q-factors successfuly satisfy the theoretical criterion in the free molecular flow regime, slip-based continuum models fail to predict the Q-factors in the transition and free molecular flow limits. These models also fail for high Stokes number conditions.


2012 ◽  
Vol 53 (3) ◽  
pp. 419-423 ◽  
Author(s):  
A. V. Kryukov ◽  
I. M. Kurchatov ◽  
N. I. Laguntsov

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