The superior properties of CrN coatings prepared by high power pulsed reactive magnetron sputtering

AIP Advances ◽

10.1063/1.5132783 ◽

2020 ◽

Vol 10 (1) ◽

pp. 015125

Author(s):

Qian Li ◽

Lizhen Yang ◽

Zhengduo Wang ◽

Haibao Zhang ◽

Zhongwei Liu ◽

...

Keyword(s):

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

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Microstructure and electrical property of tantalum oxynitride thin films prepared using high-power impulse reactive magnetron sputtering

Japanese Journal of Applied Physics ◽

10.35848/1347-4065/abc0ae ◽

2020 ◽

Vol 59 (11) ◽

pp. 116502

Author(s):

Ping-Yuan Lee ◽

Cheng-Xian Lin ◽

Ying-Chieh Lee

Keyword(s):

Electrical Property ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron

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The mechanical properties evaluation of the CrN coatings deposited by the pulsed DC reactive magnetron sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2005.07.047 ◽

2006 ◽

Vol 200 (10) ◽

pp. 3330-3335 ◽

Author(s):

Jyh-Wei Lee ◽

Shih-Kang Tien ◽

Yu-Chu Kuo ◽

Chih-Ming Chen

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Pulsed Dc ◽

Dc Reactive Magnetron Sputtering ◽

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Textured Growth of AlN Films Deposited on Si(100) by DC Reactive Magnetron Sputtering and by High Power Impulse Magnetron Sputtering (HiPIMS)

Proceedings of the 6th International Conference on Recrystallization and Grain Growth (ReX&GG 2016) ◽

10.1007/978-3-319-48770-0_44 ◽

2016 ◽

pp. 299-302

Author(s):

B. Riah ◽

A. Ayad ◽

J. Camus ◽

M. A. Djouadi ◽

N. Rouag

Keyword(s):

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering

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Textured Growth of A1N Films Deposited on Si(100) by DC Reactive Magnetron Sputtering and by High Power Impulse Magnetron Sputtering (Hipims)

Proceedings of the 6th International Conference on Recrystallization and Grain Growth (ReX&GG 2016) ◽

10.1002/9781119328827.ch44 ◽

2016 ◽

pp. 299-302

Author(s):

B. Riah ◽

A. Ayad ◽

A. Ayad ◽

J. Camus ◽

M.A. Djouadi ◽

...

Keyword(s):

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering

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Influence of silicon content on the microstructure and hardness of CrN coatings deposited by reactive magnetron sputtering

Materials Chemistry and Physics ◽

10.1016/j.matchemphys.2010.02.024 ◽

2010 ◽

Vol 121 (3) ◽

pp. 567-571 ◽

Author(s):

Hetal N. Shah ◽

R. Jayaganthan ◽

Davinder Kaur

Keyword(s):

Magnetron Sputtering ◽

Silicon Content ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

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INFLUENCE OF DEPOSITION PARAMETERS ON THE STRUCTURE AND THERMAL STABILITY OF Ti-Al-N COATINGS PRODUCED BY REACTIVE MAGNETRON SPUTTERING

High Temperature Material Processes (An International Quarterly of High-Technology Plasma Processes) ◽

10.1615/hightempmatproc.2015015725 ◽

2015 ◽

Vol 19 (2) ◽

pp. 105-112

Author(s):

F. F. Komarov ◽

Iryna M. Klimovich ◽

O. V. Korolik ◽

V. A. Zaikov ◽

O. R. Lyudchik

Keyword(s):

Thermal Stability ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Deposition Parameters ◽

Thermal Stability Of

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Structure and Electrical Property of CuInS2 Thin Films Deposited by DC Reactive Magnetron Sputtering

Journal of Inorganic Materials ◽

10.3724/sp.j.1077.2011.01287 ◽

2011 ◽

Vol 26 (12) ◽

pp. 1287-1292 ◽

Author(s):

Chang YAN ◽

Fang-Yang LIU ◽

Yan-Qing LAI ◽

Yi LI ◽

Jie LI ◽

...

Keyword(s):

Electrical Property ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering

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Characterization of ferroelectric hafnium/zirconium oxide solid solutions deposited by reactive magnetron sputtering

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.5060643 ◽

2019 ◽

Vol 37 (2) ◽

pp. 021203 ◽

Author(s):

Jordan Bouaziz ◽

Pedro Rojo Romeo ◽

Nicolas Baboux ◽

Bertrand Vilquin

Keyword(s):

Magnetron Sputtering ◽

Solid Solutions ◽

Zirconium Oxide ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron

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Effect of SiC thickness on microstructure and mechanical properties of (AlCrTiZrV)N/SiC nano-multilayers film synthesized by reactive magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2021.138724 ◽

2021 ◽

pp. 138724

Author(s):

Bohan Li ◽

Xun Ma ◽

Wei Li ◽

Qingqing Zhai ◽

Ping Liu ◽

...

Keyword(s):

Mechanical Properties ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Microstructure And Mechanical Properties

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Effect of Annealing Temperature on TiO2 Nanorod Films Prepared by dc Reactive Magnetron Sputtering for Dye-Sensitized Solar Cells

Journal of Inorganic and Organometallic Polymers and Materials ◽

10.1007/s10904-011-9538-y ◽

2011 ◽

Vol 21 (4) ◽

pp. 770-776 ◽

Author(s):

Lijian Meng ◽

Can Li ◽

M. P. dos Santos

Keyword(s):

Solar Cells ◽

Magnetron Sputtering ◽

Annealing Temperature ◽

Dye Sensitized Solar Cells ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Tio2 Nanorod ◽

Dye Sensitized ◽

Dc Reactive Magnetron Sputtering ◽

Sensitized Solar Cells

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